Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 80mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Double Clevis, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 200mm, First Stroke: 80mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

RHC

7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they

SL5200

100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

SFOD-OMT0009CN

200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1 1) 2)PLCDC24V 12.

ARM10/11

0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate

ARM10/11

0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate

Digital Flow Switch

Max. load current 80 mA Max. applied voltage (NPN only) 28 VDC Internal voltage drop (Residual voltage) NPN output type: 1 V or less (at load current of 80 mA) PNP output type: 2 V or less (at load current of 80 mA) Response time*5 Select from 1 s, 2 s, or 5 s.

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

Table of Contents

200 203 Series CDQ2 With Auto Switch.

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

AC Servo Motor Driver (Pulse input type/Positioning type)

Home Position Return Method .80 6.1 Position Control Mode (Pulse Input). 80 6.2 Positioning mode (point table) . 80 6.2.1 Stopper type home position return . 81 7.

Vacuum Unit

80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k Black For supply valve (,+) Black For supply valve (,+) Coil White White Pilot valve for release Pilot valve for release LED (Red) Black LED

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When female thread is used, use a washer etc. to prevent the contact part at the rod end from being deformed depending on the material of the workpiece. 3.5 H ZZ + Stroke (mm) P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 ZZ H H2 H1 B2 B1 80 80 82 108 KA FL 10.5 10.5 10.5 13.5 A 20 25 32 40 GB 6 8 10 12 GA 8 8 8 11 AL 18 22 22 24 D 15.5 19.5 19.5 21 WA 31 31 31 36 E 8 10 12 14

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

pressure: 0.5MPa Graph to 300mm/s Graph to 500mm/s 120 80 63 63 70 100 60 Refer to graph based on horizontal mounting and load center of gravity position.

Rotary Cylinder Series MRQ Size: 32, 40 1

D20Weight Rotating angle Flange (g) Basic weight (g) Add'l stroke weight (g/mm) Size 80 to 100 1400 4 500 32 170 to 190 1500 80 to 100 2100 40 5 500 170 to 190 2300 Calculation: (Example) MRQBS32-50CA Basic weight 1400 g 4 x 50 = 200 g Stroke additional weight Total 1600 g For the weight of auto switch alone, refer to page 11-11-1.

A

63 16.5 IS1000E-303 38 IS1000M-6 15 100 72.5 23 54 AC3000 IS1000E-304 12 40 80 63 17.5 *Without Yoke Clip.

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type