Digital Flow Switch

80 40 M5 x 0.8 depth 8 PF3A712H Rc2, NPT2, G2 200 70 104.1 80.3 35 85 50 100 50 M6 x 1.0 depth 9 Lead wire and M12 connector (Part no.: ZS-37-A) 1: Brown (38.6) (3000) (45) 2: White Cable Specifications Conductor Nominal cross section AWG23 15 Insulator Outside diameter Approx. 1.1 mm 3: Blue 4: Black Color Brown, Blue, Black, White M12 Sheath Finished outside diameter 4 Pin no.

MU

Additional weight 0.23/50 stroke Stroke 100 stroke 0.46 + 100 / 50 X 0.23 = 0.92kg Standard Stroke (mm) Size Standard stroke Max. stroke(mm) 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Contact SMC for any intermediate strokes that are not indicated above, as they will be produced upon receipt of order.

CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

Stroke Reading Cylinder and Counter

49.5 64 M14 x 1.5 14 4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 1 8 Rc 41 34 5.5 M6 x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14

CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

80 65 55 M39 x 1.5 60 57 45 15 41 95 295 M30 x 1.5 45 42 35.5 13 30 80 280 0.030 0.076 0.036 0.090 100 80 65 M48 x 1.5 75 72 56 16 50 115 325 M39 x 1.5 60 57 45 15 41 100 310 6 Series CH2E/CH2F/CH2G/CH2H Dimensions Transaxial foot type/CH2ELA, CH2FLA, CH2GLA, CH2HLA H + Q + l LW F NA LW S + Stroke B Air release H 2-RcP GB NB R J GA MM D E e LH LT 4-CD Width across flats G MA A K Y l C 10

HRX-OM-R016

Rated Rated Sensitivity supply voltage x size voltage current of leak [V] [A] current [mA] 3 cores x 10 30 HRS030--20 1-phase 14AWG (3 cores x 2.0mm2) 200, 200-230V AC 230 HRS030--20-T (50/60Hz) 15 30 (including (High pump head [Optional]) ground) HRS Series 3.3 Installation 3-9 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.3.3 Preparation and wiring of power supply cable The electrical

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

LX Series Compact Electric Actuators

(See page '|{) and 45) $8[i8$ [l( cmnaclttecrrn nummr' series LX Product Variations Series Drive Screw I ype Model MaxHorlzontal Haytoad ( N ) i\.lax. vedic;l ' 'Payq?q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!

Title not found

SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

Title not found

SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

How to Order Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications: VT/VO317V) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

Clean Gas Filter

Series Clean Gas Filter/Clean Gas Strainer: Cartridge Type/Straight Type Dimensions SFB100/200: Rc 1/4 SFB101/201: NPT 1/4 SFB104: M5 HAA HAW Bracket 2 x M5, Rc 1/4, NPT 1/4 AT IDF IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG

3 Port Solenoid Valve Metal Seal Series VZ200 1

rise (C) 45 or less For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

Heavy Duty Stopper Cylinder

200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit