SL5200

Please contact SMC. 95 Process Gas Equipment / Regulator Specific Product Precautions Be sure to read before handling. Refer to back cover for Safety Instructions and P. 145 and 146 and the Operation Manual for common precautions. Operation manual is available from the SMC web site. http://www.smcworld.com Selection Warning Maintenance Warning 1. Confirm the specifications.

Air Cylinder NCQ7 Series Compact Cylinder

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

position Exhaust center 85 92 138 Pressure center 2 position Single 85 89 112 Double 101 108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103 149 Double C6 ( ) 6 One-touch fitting SY560--C6 Closed center 3 position 102 109 155 Exhaust center Pressure center Single 72 76 99 2 position Double 88 95

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

asilltr

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

A parallel key is used instead of chamfer for size 40. +5 0 +5 0 ( +4 0 +4 0 = Max. = 110 End of rotation ) e = Max. = 200 g ( e ) g n n a a r r n n o o i i t t a a t t o o R R End of rotation (90) Chamfer Chamfer (Start of rotation) (Start of rotation) (45) A port B port A port B port Start of rotation is the position of the chamfer (keyway) when B port is pressurized.

XL-OMY0002

-50 12 10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD-63 AC90240V XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600

CXT

Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.

VP3145/3165/3185

VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz G Grommet Conduit terminal DIN terminal TL D T Note) N.O.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Rotary Actuator/Vane Type

A parallel key is used instead of chamfer for size 40. +4 0 = Max. = 110 e g n a r End of rotation n +4 0 = Max. = 200 o i t e g a n a t r o n R o i End of rotation t a t o R (90) DChamfer (Start of rotation) Start of rotation is the position of the chamfer (key) when B port is pressurized.

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

XL-OMV0002

154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6

LEC-OM02904

(MR Configurator2 TM) 4 7 4 4.4 4.2 4.5.2 JOG 4.5 JOG TM) (MR Confignrator2 4.5 (EM1) TM (MR Confignrator2 JOG 4 8 4 TM) 4.5.1 (MR Configurator2 (SW2-1)SSCNET (1) (A) JOG JOG ON/OFF (MR Confignrator2 TM)JOG [r/min] 200 0 [ms] 1000 050 ON OFF (b) ON/OFF (MR Confignrator2 TM) [pulse] 262144 09 [r/min] 200 0 [ms] 1000 050 (CCW)(CW) (CCW) (CCW)(CCW) (CW) (CW)(CCW) (CW)(CW) [s

Heavy Duty Stopper Cylinder

200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit

ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog output/3 rotation setting Nil S High noise reduction type Standard type E19 1 point setting/analog output/200 degrees setting M21 M15 1 point setting/without analog output