Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

XL

XLC, XLCV Dimensions (mm) 1in = 25.4mm (b) XLC/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) H J Heater (optional) B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95

Process Pump

PB PAF PAF 4 x 7 mounting hole (Option is selected) Bottom view of body Air operated reset port Rc, NPT, G 1/8" PA PB FLUID OUT Rc, NPT, G 3/8" (102) AIR SUP Rc, NPT, G 1/4" 16 119 106 97 77 43 13 14 Foot (Option) FLUID IN Rc, NPT, G 3/8" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) 63 74 Tube extension: PAF3410P13 P13N P13F 139 152 2 x M5 x 0.8 Thread depth 9 Reset button 139 114 95

XM, XY

110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178 209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

SYJ Conduit terminal: VP3165-T A B DIN terminal: VP3165-D A B VQZ VP [105] Light (For TL, TZ) 76 30 Max.12 31.3 G1/2 VG Applicable cable 6 to 12 Light position (For DL, DZ) VP3 VP3 G1/2 NO NO [221] 215.6 219 206.5 PE PE 191 26 26 108 108 45 45 36 36 95 95 [ ]: With indicator light (TL, TZ) 1311 VP3185 Series Dimensions: VP3185 Grommet: VP3185-G A B 140 87.4 54 35 81 106 G1/2 1/4 (PA port

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Series AMG 99% Oil smell 14-20-3 3 m (95% capture of the particle diameter) Main line filter Eliminates impure particles such as oil and foreign objects, etc. in compressed air.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Fluoropolymer Tubing Variations

Recommended radius Tube close bend radius Min. bending radius (mm) Note 4) 15 10 20 15 35 20 60 40 95 60 100 65 130 110 Fixed end Air, Inert gas: -20 to 200C Water: 0 to 100C (No freezing) Operating temperature Material FEP (Fluorinated Ethylene Propylene Resin) Note 1) When using a fluid in liquid form, the surge pressure must not exceed the maximum operating pressure.

Electric Actuator Triple Axis P&P Unit

B 200W without brake C Motor specifications Matsushita Electric Industrial Co., LTD Motor specifications Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Brake 750W without brake 200W with brake Symbol D L 750W with brake Stroke(mm) M 100 150 10 15 750W without brake N Matsushita Electric Industrial Co., LTD 750W with brake 950 1000 P 95 A0 Standard strokes

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.

SMC Pneumatic Clean Series

When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

Basic Type/Direct Mount Type

18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Bag Filter

Kinematic viscosity: 20 mm2/sec Flow coefficient: 95% 2) Flow rate conversion Convert the flow rate when viscosity is equivalent to water using the flow coefficient obtained in step 1). 285 L/min flow coefficient 95% = 300 L/min 300 L/min flow rate is necessary when viscosity is equivalent to water. After this, make a selection using the selection method.