Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

CG5-S

(mm) Stroke range A Bore size (mm) P AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM S ZZ NA 20 1/8 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 83 124 29 to 200 25 1/8 22 19.5 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 83 129 29 to 300 32 1/8 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 85 131 35.5 to 300 40 1/8 30

RSH/RS1H

4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 Data 10-9-13 13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

Clean Air Module

80 60 0.2 MPa 50 60 40 40 30 20 20 10 0.1 MPa 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) LLB4-1-P1R1VSF: High Flow Type (500 L/min) 500 600 Set pressure 0.4 MPa 0.3 MPa 500 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 400 400 300 0.2 MPa 300 200 200 0.1 MPa 100 100 0 1 2 3 4 5 6 7 8 9 11 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

RSH/RS1H

load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 Data 10-9-13 13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

Suction Filter with Case FH99 Series

-1 AL-135H AL-136H AL-137H KA00813 (V120) OUT AL-130H-V Hexagon socket head cap screw Relief valve AL-133H-V FKM-70 or EPDM-70 Companion flange Phosphoric ester AL-135H-V e Seal (O-ring) Case AL-136H-V AL-137H-V w O-ring KA00728 (V120) IN Note 1) The material and nominal size notations are based on JISB2401.

Lightweight and Compact

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

53

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

Air Fittings & Tubing

Length 18 19 20.5 23 Applicable tube model TUS0425 TUS0604 TUS0805 TUS1065 TUS1208 Tube drawing strenght N Without inner sleeve With inner sleeve (Using One-touch fitting) TJ-0425 TJ-0604 TJ-0805 TJ-1065 15 60 60 85 110 80 230 250 300 480 Note1) Not clear but opaque due to material.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

244 14.5 16 285.5 275 254.5 15.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 16 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) U1 2 Scale: 37% 2n1-M5 x 0.8 [With external pilot] (A, B ports) 24 13.3 (Pitch) P=10.5 13.3 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2

SZ3000

16 285.5 275 254.5 15.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 14 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) U1 2 1 2 1 2 Note) The L1 to L4 dimensions for SS5Z3-60PD Dare the same as the SS5Z3-60PD Udimensions.

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

400 500 280 560 Data 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Tie-rod Type Hydraulic Cylinder

Content 70% flat black 1 Rod cover Aluminum alloy 40 CHA40-PS 70% flat black 2 Head cover Aluminum alloy 50 CHA50-PS Hard anodized Aluminum alloy 3 Cylinder tube 63 CHA63-PS Carbon steel Nos. !

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 25300300300 34 84 122 172 50 4 4.5 3 6 16 22 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

7.9 0.33 3 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 500 660 320 500 660 500 660 500 660 500 660 500 660 7.9 0.33 3.0 1 4 (8A) 15 0.61 4.5 4.5 15 0.61 3.0 1 4 (8A) 6 1.1 6 26 26 1.1 3 1.6 8 38 7.9 0.33 1.0 3 8 (10) 4.5 1.9 10 46 15 0.61 6 0.33 3 7.9 26 1.1 Note) Weight of grommet type.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Bore size (mm) Bore size (mm) FT FY FX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 207 0.2 0.18 0.13 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 212 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 233 M20 x 1.5 30 27 22.4 9 19 60 228 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 258 M24 x 1.5 35 32 28 11 24 70

Non-contact Gripper

ZP3E 300 g 300 x 9.8/1000 = 2.94 N N = (9.8 x W/1000)/(F) = (9.8 x 9700/1000)/(11.2) = 9 Rounding up to the nearest higher integer ZP2 For a workpiece mass of 300 g (2.94 N) XT661-6A: Temporary lifting force 2.95 N Workpiece mass 300 g (2.94 N) XT661-8A: Temporary lifting force 3.75 N Workpiece mass 300 g (2.94 N) XT661-10A: Temporary lifting force 7.2 N Workpiece mass 300 g (2.94 N)

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.