CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without

Precision Regulator

200 250 300 350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0

IR1000/2000/3000

250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0

IR1000/2000/3000

0 50 100 150 200 250 300 350 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 (MPa) 0.8 Set pressure (MPa) Set pressure (MPa) 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

Air Slide Table Series MXQ

50 MXQ20-50 MXQ20-30 MXQ20-100 MXQ20-150 0.08 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-100 MXQ20-20 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75

MXS

-100 0.04 Table deflection (mm) 0.030 Table deflection (mm) Table deflection (mm) 0.05 MXS2575 MXS2575 MGQ MXS2540 MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

JXCx-OMT0005CN

JX C D 1 LEFS16B-100B-S1CD17S LEFS16B-100 D DeviceNet DeviceNet 1 1 DC24V S T T 7 8 DIN <> LEHZ10K2-4 < >LECPMJ SVRE 1.5 7 - 2.3 *1 DeviceNet PLC JXC-CD-TJXC-CD-S DC24V P5062-5 *1 LE-CP-LE-CP---S ENC *2 120.3 120.3 mm mm MOT 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 PWR DC24V USB A-miniB type JXC-CPW AWG200.5mm 2

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 39 Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5 (For mounting) 13 36.9 (DIN 38.1) 21.5

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N)

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

OMR0031

Speed Vc Acceleration Aa Speed [mm/s] Total travel distance S Time [s] Positioning time Tp LAT3LAT3MLAT3FShortest positioning time [ms] 600 350 700 Shortest positioning time [ms] Shortest positioning time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g

Air Tank Series AT 1

M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Fluoropolymer Tubing Variations

TH0604N Color KQB2 Translucent 250 m reel 500 m reel X64 KS KX Reinforced corrugated cardboard specification: Longer length reel/-X64 KM Dimensions KF Dimensions M Model D1 D2 D3 W Weight (kg) H/DL L/LL TH0604N-250-X64 TH0604N-500-X64 200 200 475 475 52 52 120 220 9.4 18.5 D1 KC KK D2 D3 W KK130 DM KDM KB KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 507 FEP Tubing (Fluoropolymer) Inch Size

RZQ

Caution 5 150 100 200 300 1.