Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) Please consult with SMC if other specifications for surface treatment are required. 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Laser marking Hexagon wrench 8-18-2 8-18-3 3 Series CYV Model Selection 1 Caution on Design (1) The allowable load mass moment differs depending on the workpiece mounting method, cylinder mounting orientation and

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

73 330 177 100 56 9.7 108 145 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 100 56 12.8 108 150 4 x M12 x 1.75 22 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 20.4 126 180 4 x M12 x 1.75 22 0 209 62 285 147 90 51 6.9 98 120 2 x M10 x 1.5 18 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 20 (3/4B) 0 250 73 330

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Lead wire length (m) Load voltage Indicator light Auto switch model Pre-wire connector Applicable load Special function Type Electrical entry Wiring (Output) AC DC 0.5 (Nil) 3 (L) 5 (Z) None (N) C73 C80 B53 B54 B64 C73C C80C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF G59 K59 100 V Yes 12 V Relay, PLC No IC circuit 100 V or less 5 V, 12 V Reed switch Solid state switch Grommet PLC Yes

LMU100/200 Series Mist Spray Unit

Contact capacity 50 VA AC, 50 W DC 1 2 5 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Pressure gauge for supply pressure Pressure gauge for tank pressure Pilot valve Recommended Equipment AIR BLOW Supply pressure AIR It is recommended to use each mist spray unit type with the mixing valves, magnet holders, branch pipes and nylon tubes listed in the table below.

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Mechanical Valves Series NVM, NVFM, NVZNI

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

EXxx-OMN0029CN

EDS Enable (SC_MonSs) 1 Disable Enable (Inrush) 100 msec 2 Disable 0.1 ms 1.0 ms 1.0 ms 10 ms 20 ms 3 (Filter_T) 1.0 ms 15 ms 15 ms 100 ms 200 ms 4 (SigExt_T) Enable (SC_MonOp) 5 1 Disable Auto (SC_RstOp) 6 Manual Enable 7 (OC_Mon) 6 Disable Clear OFF 2 6 Hold 8 (Fault_MD) ForceON ON Clear OFF 2 3 6 Hold 9 (Idle_MD) ForceON ON ON Enable Val165000

4/5 Port Air Operated Valve Series SYJA3000

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size

IIIIIII

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

Compact Guide Cylinder End Lock Type SeriesMGP

Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.

Ambient Dryer Series AMG

AMG 650 s5o) AMG 250 N I Body Size.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

suppressor With light/surge voltage suppressor Types S, Z Types R, U 38 or less 2 position single 33 or less 31 or less 30 or less 2 position double 28 or less 27 or less 56 or less 3 position 50 or less 50 or less Solenoid Specifications Grommet (G), (H), L type plug connector (L), M type plug connector (M), DIN terminal (D) Note 1) Electrical entry 24, 12, 6, 5, 3 DC Rated coil voltage V 100

Siiiil"Tivrc

AMG 650 s5o) AMG 250 N I Body Size.

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

10-cls-e

V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

260.5 14 234 244 275 285.5 15 250 260 287.5 298 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6: