Rotary Table/

10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

VZS

100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220 VAC, 50/60 Hz G 2 position double 5 6 9 24 VDC 12 VDC Note) Indicator light is not available for grommet type.

VQ7-6/7-8

50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port

SYJ300/500/700

SY100-30-3AS Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Lead wire length U Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

XM, XY

XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 492 Stainless steel High Vacuum Angle/In-line Valve XMH, XYH Series Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature (C) 5 to 150 1 x 10-6 up to atmospheric pressure Operating pressure (Pa

7ND9071en

The display starts to blink next position (50 % or 20 %).

Table of Contents

K M H D Plug Insertion Force in Pressurized Condition MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Insertion Force of Series KK T 350 300 VMG 250 Insertion force N Series KK6 200 Series KK4 150 100 Series KK3 Series KK2 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 15 0.4 0.3 150 0.4 0.4 MHK 40 10 0.3 0.3 100 0.2 0.2 0.2 MHS 5 20 50 MHC 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHT MHW2-25D MHW2-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10 20 D0 20 40 60 Gripping point L (mm) 100 80 20 40 60 Gripping point L (mm) 80 100 120 140 160 0 20Confirmation of Gripping Point MHY Step 2 MHW 200 60 H H 50 Overhang H (mm) Overhang H (mm) MHW2-20D 150 MHW2-25D MHW2

Air Cylinder NCA1 Series

STOP TUBE REQUIREMENTS / TABLE 2 L (in) Tube Length (in) 0-40 0 41-50 1 Pivot and Rigidly Guided Side-Tapped, Head or Cap Flange, Tie-Rod, Center or Side Lug 51-60 2 61-70 3 .70 71-80 4 81-90 5 91-100 6 101-110 7 111-120 8 121-130 9 131-140 10 Supported but not Rigidly Guided Side-Tapped, Head or Cap Flange, Tie-Rod, Center or Side Lug 141-150 11 151-160 12 2.00 161-170 13 171-180 14 181

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

MHY2/MHW2

0.1 0.1 5 L L 0 20 30 50 60 Holding point L (mm) 40 70 0 30 40 60 70 Holding point L (mm) 50 80 90 2.8-4 180 Angular Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7MPa Pressure 0.7MPa Pressure 0.7MPa 250 20 0.6 80 0.6 0.6 Holding force (N) Holding force (N) Holding force (N) 200 0.5 0.5 0.5 60 15 0.4 0.3 150 0.4 0.4 40 10 0.3 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40

VDW

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.