Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing type High precision guide type CY B 1 3 Guide non-integrated type Guide integrated type 6 10 15 20 25 32 40 50 63 CY R 1 3 Magnetically coupled rodless cylinder 6 10 15 20 25 32 40 CY1S 6 10 15 20 25 32 40 CY1L 10 15 20 CY1H 25 (Single axis) 25 (Double axis) 32 Bilateral piping type Centralized piping type Auto switch Shock absorber The piping type for CY1R6 is bilateral piping only

5 Port Solenoid Valve Series SY3000/5000/7000/9000

+ 25 18.5 10 0.8 16.9 13.1 10-SY3120-H-M5(-F2) G 22.5 (A, B port) M5 x 0.8 28.5[35.5] 28.5[35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) (For manifold gasket positioning) 2-1.5 die-cast hole 19 22.5 L plug connector (L): 10-SY3120-L-C6,N7(-F2) 1 1 C4,N3 M plug connector (M): 10-SY3120-M-C6,N7(-F2) C4,N3 M8 connector (WO): 10-SY3120-WO-C6,N7(-F2) C4,N3 1 28.5[35.5] 13.1

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

KJ

24 27 25 24 27 10 10 27.5 20.8 4 2.5 13 15.5 1.5 19.3 3 2-applicable tubing 10 27.2 20.5 13 19.3 10 12 3 6 15.2 4 12 30.2 23.5 23 23.3 12 14 15.7 16 17 15.7 16 17 15.7 17 15.7 18.8 17 15.7 18.8 19 17.7 18.8 19 17.7 18.8 30.2 23.5 4 24.3 23 23.3 24.3 23 24.3 23 27.3 24.3 23 27.3 27.5 26.2 27.3 27.5 26.2 27.3 5 19 30.2 23.5 16.2 8 12 14 16 30.2 23.5 5 6 25 30.2 23.5 27 Connection thread 12

MGP

80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-9 Series MGP Operating Range When Used as Stopper Bore Size 12 to 25/MGPM12 to 25 (Slide Bearing) MGPM12 to 25 (Slide Bearing) 100 l @ 50mm l @ 50mm l @ 50mm u u 25 m m 50 40 20 Transported object weight

Table of Contents

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

CM2

30 M8 x 1.25 M20 x 1.5 9 14 15.5 13 25 5 28 5 15 24 1/8 133 142 20 -X 0 0.033 25 45 8 13 10 30 22 19 62 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 33.5 5.5 15 30 137 146 1/8 26 0 0.033 32 45 8 13 12 30 22 19 64 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 37.5 5.5 15 34.5 139 148 1/8 26 200 0.039 40 50 11 16 14 38 24 30 88 10 15 39 M14 x 1.5 M32 x 2 11 18 21 22 41.2 8 46.5 7 21.5 42.5

Table of Contents

62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5 125.5 125.5 93 93 25 (X port) 25(X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size

Proposals for Energy Saving

tank, Foot type HC03-80-Q4602-25 1 : 10 25 With tank, Foot type CA1LH63-Q7886-50 1 : 10 50 With tank, Foot type TMS80-A2484-178 1 : 10 87 With tank, Foot type CA1LH63-Q8409-100 1 : 10 100 With tank, Foot type CS1LN160-Q3930-147 1 : 10 147 Without tank, Foot type CA1BH100-Q5896-60 1 : 11 60 Without tank, Basic type CDQ2LH140-P6024-90 1 : 12.25 90 Without tank, Foot type 10 to 19.9 CDQ2LH140

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

CA2

30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 10 12 16 20 25 16 19 23 28 36 1/4 3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CM2

Z H MM ND +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 9 10 14 18 25 66 41 M8 X 1.25 9 M10 X 1.25 9 10 14 22 25 69 45 9 M14 X 1.5 16 13 25 24 49.7 92 50 12 Double Knuckle Joint (mm) Applicable bore size A1 Applicable pin part No.

Air Fittings & Tubing

3.2 4.1 12 22 33 13 21 35 25 26 36 63 28 38 65 101 105 21.5 25.5 13.7 22.5 24.5 1 8 1 4 10 14 7 8 10 14 7 8 10 14 17 12 14 17 9.6 2.5 3 17.5 15.5 10 M5 X 0.8 M6 X 1.0 3.5 3.5 15.6 15.3 12.7 9.3 14.7 22 26 14.7 15.7 23 27 29 4 1 8 1 4 23 25 4.2 10.4 18 16 4.2 10 M5 X 0.8 M6 X 1.0 3.5 11.6 3.5 16.1 17.4 13.5 6 1 8 25.5 27.5 29 9.0 12.8 20 17 11.4 10 1 4 3 8 28 30 31.5 24.5 28.5

Environment

Duty ratio: 50% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000

V100

10 units.