Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

90

Annual cost reduction effect [Calculation conditions] Electric power cost: 1.55 yen/m3 [Work model] Working hours: 6000 h (250 days/year) Supply pressure: 1.0 MPa Set pressure: 0.2 MPa Comparison between IR3000-A and the current IR3000 Comparison between IR1000-A/IR2000-A and the current IR1000/IR2000 300 300 Annual cost of power consumed by compressor [1000 yen/year] 250 250 When 20 units

48

mm/s 50 to 250 mm/s Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) Stroke length tolerance +1.5 0 mm 1 Max. speed with no load 2 Depending on the system configuration selected, the specified speed may not be satisfied.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm RS Q G Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

MLU

, 300 Max. manufacturable stroke 25, 32, 40, 50 Data 300 Strokes other than the above are produced upon receipt of order.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

Vacuum Filter AFJ Series

drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Plate Cylinder with Lock Series MLU

, 300 Max. manufacturable stroke Size 25, 32, 40, 50 300 Strokes other than the above are produced upon receipt of order.

3 Position Cylinder Series RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Shot Pin Cylinder

Deflection + L F F (Dimension when extended) + M Built-in coil scraper and Lube-retainer MAllowable lateral load graph MSelectable proximity switches CKZP57L TURCK P&F 400 Allowable lateral load [N] 350 300 250 200 MAdjustable connector angle 150 100 CKZP57L: 45, 90 CKZP71: 0, 45, 90 50 0 0 50 100 150 200 250 Offset distance L [mm] CKZP71 0 50 100 150 200 250 300 350 400 450 500

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.016 0.043 +0.043 0 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 M16 x 1.5 25 22 18 7 14 55 250 0.025 0.064 0.020 0.053 +0.052 0 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 M20 x 1.5 30 27 22.4 9 19 60 280 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 M24 x 1.5 35 32 28 11 24 70 327.5 0.030 0.076 0.025 0.064 +0.062 0 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 M30 x 1.5

Rotary Table/

100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement

AMD

520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57