Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4

Multistage Ejector (N)ZL Series

(3.5) 63 (2.2) (N)ZL112 200 (7.0) 126 (4.4) (N)ZL212 2 Multistage Ejector Series (N)ZL Selection ZL112 ZL212 Exhaust characteristics Exhaust characteristics 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate 250 125 Vacuum pressure

Air Catch Sensor

200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Closed center SQ1000 SQ1331 33 or less 0.16 0.26 0.58 0.15 0.20 0.64 25 or less Rubber seal 100 SQ1430 26 or less 0.14 0.14 0.60 0.14 0.12 0.58 20 or less Metal seal 100 Exhaust center SQ1431 33 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less Rubber seal 100 SQ1530 26 or less 0.14 0.14 0.63 0.14 0.12 0.62 20 or less Metal seal 100 Pressure center Courtesy of Steven Engineering, Inc.-230

α PneuAlpha HARDWARE MANUAL

Hardware Specication 2.1 Available Models PneuAlpha Hardware Specification 2 ECC-PNAL-20MT-D 12 TRANSISTOR 8 ECC-PNAL-10MT-D 6 TRANSISTOR 4 (0.70)* ECC-PNAL-20MR-D ECC-PNAL-20MR-A 100 240V AC~ 100 240V AC~ 12 RELAY 8 124.6 x 90 x 55 ECC-PNAL-10MR-D ECC-PNAL-10MR-A 6 RELAY 4 ECC-PNAL-6MR-A 100 240V AC~ 100 240V AC~ 4 RELAY 2 71.2 x 90 x 55 Model Power Supply * Without Special Connection Modules

Power Clamp Cylinder

Maximum Clamping Moment Max. clamping force Bore size (mm) 0.8 MPa 0.7 MPa 0.6 MPa 0.5 MPa 0.4 MPa 0.3 MPa Nm Ibfin Nm Ibfin Nm Ibfin Nm Ibfin Nm Ibfin Nm Ibfin For Asia For North America For Europe For France Special 40 194 1717 178 1575 154 1363 118 1044 76 673 35 310 50 250 2212 220 1947 190 1681 160 1416 130 1150 100 885 63 550 4867 500 4425 450 3982 400 3540 350 3097 300 2655 80 1360

Wireless System

Link, No Activity (100 Mbps) Communication status of EtherNet/IP ports 1 and 2 Green LED flashes. Link, Activity (100 Mbps) Orange LED is ON. Link, No Activity (10 Mbps) 7 LINK/ACT1 LINK/ACT2 Orange LED flashes. Link, Activity (10 Mbps) Red LED is ON.

MU

Additional weight 0.23/50 stroke Stroke 100 stroke 0.46 + 100 / 50 X 0.23 = 0.92kg Standard Stroke (mm) Size Standard stroke Max. stroke(mm) 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Contact SMC for any intermediate strokes that are not indicated above, as they will be produced upon receipt of order.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) Please consult with SMC if other specifications for surface treatment are required. 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Laser marking Hexagon wrench 8-18-2 8-18-3 3 Series CYV Model Selection 1 Caution on Design (1) The allowable load mass moment differs depending on the workpiece mounting method, cylinder mounting orientation and

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

73 330 177 100 56 9.7 108 145 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 100 56 12.8 108 150 4 x M12 x 1.75 22 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 20.4 126 180 4 x M12 x 1.75 22 0 209 62 285 147 90 51 6.9 98 120 2 x M10 x 1.5 18 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 20 (3/4B) 0 250 73 330

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Lead wire length (m) Load voltage Indicator light Auto switch model Pre-wire connector Applicable load Special function Type Electrical entry Wiring (Output) AC DC 0.5 (Nil) 3 (L) 5 (Z) None (N) C73 C80 B53 B54 B64 C73C C80C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF G59 K59 100 V Yes 12 V Relay, PLC No IC circuit 100 V or less 5 V, 12 V Reed switch Solid state switch Grommet PLC Yes

LMU100/200 Series Mist Spray Unit

Contact capacity 50 VA AC, 50 W DC 1 2 5 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Pressure gauge for supply pressure Pressure gauge for tank pressure Pilot valve Recommended Equipment AIR BLOW Supply pressure AIR It is recommended to use each mist spray unit type with the mixing valves, magnet holders, branch pipes and nylon tubes listed in the table below.

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Mechanical Valves Series NVM, NVFM, NVZNI

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

EXxx-OMN0029CN

EDS Enable (SC_MonSs) 1 Disable Enable (Inrush) 100 msec 2 Disable 0.1 ms 1.0 ms 1.0 ms 10 ms 20 ms 3 (Filter_T) 1.0 ms 15 ms 15 ms 100 ms 200 ms 4 (SigExt_T) Enable (SC_MonOp) 5 1 Disable Auto (SC_RstOp) 6 Manual Enable 7 (OC_Mon) 6 Disable Clear OFF 2 6 Hold 8 (Fault_MD) ForceON ON Clear OFF 2 3 6 Hold 9 (Idle_MD) ForceON ON ON Enable Val165000

4/5 Port Air Operated Valve Series SYJA3000

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size