3 Position Cylinder Series RZQ

Model RZQ32 RZQ40,50 RZQ63 Applicable floating joint JB40-8-125 Graph 1 JB63-10-150 200 JB80-16-200 63 100 Guide Shock absorber 50 Load weight (kg) 50 40 40 32 30 Floating joint 3 position cylinder 20 10 Maintenance Caution 5 150 100 200 300 1.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Hardware Configuration 89 EDS file and icon 89 Setting using Logix DesignerTM 89 Configuration assembly 94 Parameter setting of EX600 with configuration assembly 94 Parameter setting of IO-Link device with configuration assembly 107 Configuration assembly setting method example 108 Device Level Ring (DLR) function 111 QuickConnectTM function 111 EtherNet/IPTM Object 113 IO-Link SMI service 120

Compact

F MXZ12 MXZ16 160 100 OUT side IN side OUT side IN side 140 0.7/ 80 0.7/ Supply pressure [MPa] Supply pressure [MPa] 120 Pressing force [N] Pressing force [N] 100 0.5/0.67 60 0.5/0.67 80 40 0.3/0.4 0.3/0.4 60 40 20 20 0 0 0 20 40 60 80 0 10 20 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXZ25 MXZ20 400 250 OUT side IN side OUT side IN side 350 0.7/ 0.7/ 200 Supply pressure [

WRF100

200 Unclamped position T200 S200 240 240 T240 S240 270 T270 Limit switch Clamped position Note) This product does not include the limit switch.

Table of Contents

199 200 200 203 Series CDQ2 With Auto Switch.

HRX-OM-W032

With or without the terminating resistor (120) of this product can be set by the operation display panel.

Mounting: L (Foot), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 200mm, First Stroke: 150mm

Mounting: L (Foot), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 200mm, First Stroke: 100mm

Mounting: L (Foot), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 200mm, First Stroke: 160mm

Mounting: Foot, Bore Size: 40mm, Thread: NPT Thread, Full Stroke: 200mm, First Stroke: 150mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 40mm, Thread: NPT Thread, Full Stroke: 200mm, First Stroke: 100mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 40mm, Thread: NPT Thread, Full Stroke: 200mm, First Stroke: 160mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Series HAW Water Cooled Aftercooler 1

140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1

Heatless Air Dryer Series ID 1

Fixed filter 0.5 MPa 0.7 MPa Silencer Time chart Electric circuit "Single phase 100 VAC, 200 VAC 50/60 Hz" Snap switch Fuse 1 cycle 1 cycle Inlet air temperature (C) (Saturation) Series IDAdsorbent/Silica alumina gel Series ID-Z Adsorbent/Permutite Timing motor Note 1) 100 VAC: Length of cord with attachment plug 2 m Note 2) 200 VAC: Length with cabtire cord 2 m 14-19-2 3 Heatless Air Dryer

Suction Filter with Case FH99 Series

(Including O-ring for element) FH FH With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N

HRX-OM-W038

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Recommended earth leakage breaker Model Power supply Sensitivity voltage Cable qty. x size Rated Rated of leak voltage current current [V] [A] [mA] 1-phase 200-230V AC (50/60Hz) 3 cores x12AWG HRS040-A-20 200, Recomm 230 20 30 Terminal (3 cores x3.5mm2) HRS040-W-20 block ended (including ground) screw crimp diameter terminal

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 69 56 32 24 Station L1 L2 L3 L4 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 20 341 328 304 296 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

87 435 255 100 56 12.8 108 150 4 x M12 x 1.75 22 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 20.4 126 180 4 x M12 x 1.75 22 0 209 62 285 147 90 51 6.9 98 120 2 x M10 x 1.5 18 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 20 (3/4B) 0 250 73 330 177 120 65 12.9 124 155 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight