Function: 3 (3 Position Closed Center), Pilot: Internal Pilot, Back Pressure Check: None, Voltage: R (3VDC), Common: +COM, Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Switch: None, Manual Override: Non-locking Push Style, Port Size: B4 (Elbow Downward ø4 One-touch Fitting)

/N.C.), Pilot: Internal Pilot, Back Pressure Check: None, Voltage: R (3VDC), Common: +COM, Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Switch: None, Manual Override: Non-locking Push Style, Port Size: B4 (Elbow Downward ø4 One-touch Fitting)

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

Stations: 4 Stations, Port Size: B4 (Elbow Bottom Porting w/ø4 One-touch Fitting), Wiring Specification: N (-COM), Lead Wire Length: 0 (0.6m Cable), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: B4 (Elbow Bottom Porting w/ø4 One-touch Fitting), Wiring Specification: N (-COM), Lead Wire Length: 0 (0.6m Cable), Option 1: None, Option 2: D0 (DIN Rail Mount w/o DIN Rail), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Model: 10S4 (Side-Ported, Serial Interface), SI Unit Specification: V (CC-Link), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: S (Internal Pilot/Built-in Silencer), A,B Port Size: B4 (ø4 One-touch Fitting), Downward Elbow

0.5

B4 Yellow Maintenance signal OUT (A contact) A1 A5 Turns OFF if power supply failure, incorrect high voltage, fan motor failure, CPU failure, excess current on the output circuit, emitter cartridge mounting failure, or automatic cleaning failure (for product with automatic cleaning function) is detected.

25

B4 Yellow Maintenance detection signal OUT(Contact point A) Turns ON when electrode needs cleaning. Turns OFF when power supply failure, ion discharge error, connected sensor failure, or CPU operation failure. (ON when there is no problem.) A5 Purple Error signal OUT(Contact point B) B5 White Unused Confirm the power supply cable dimensions on page 434 for the cable specifications.

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø8, Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: B4 (Female Thread M4X0.7)

Pad Diameter: 08 (ø8), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: B4 (Female Thread M4X0.7)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø8, Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: B4 (Female Thread M4X0.7)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø8, Pad Styles: B (Bellows), Material: U (Urethane Rubber), Vacuum Entry: B4 (Female Thread M4X0.7)

Stations: 3 Stations, Port Size: B4 (Elbow Bottom Porting w/ø4 One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 3 (Input Block 3 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: N [NPN (-)], Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust), US Option: X160US (Preferred US Option)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: U (Urethane Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 02 (ø2, Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 08 (Flat + Bellows), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø2, Pad Styles: U (Flat Style), Material: F (Fluoro Rubber), Vacuum Entry: B4 (Female Thread M4X0.7)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø2, Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: B4 (Female Thread M4X0.7)