MU

16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058

MU

18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058

MHK2

12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

MHK2

12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

MY1

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

MLGP

120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

MLGP

120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

Wedge Cam Operation Provides

acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.

1.63

position is changed, go back to step q.

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

3 Position Cylinder Series RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

MRQ

/2 70.5 ( 40 stroke) /2 75.5 ( 50 stroke) /2 75.5 ( 65 stroke) /2 80.5 ( 75 stroke) /2 78 ( 90 stroke) /2 83 (100 stroke) /2 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max

V

ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 14" 9.5 (N)ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5 8 18.5 38" 11 (N)ZFB401-13 64.5 34 87.5 30.5 16.5 34 24 21.5 81 25.6 23 21.7 12" 13.5 H O W T O O R D E

HRX-OM-W038

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-O021

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 42 7 Q Q Q Specifications Series SYJ300/500/700 Low Power Consumption 0.5 W Q Q Q Q Q SYJ300.pages 10-12 Q Q SYJ500.pages 13-15 Q SYJ700.pages 16-18 Q Q Q Specifications Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q 9 Series SYJ300 3 Port Solenoid Valve Valve Specifications Model Weight g Valve model Type of actuation Port

Coolant Valve

(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !