High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

Air Cylinder

100 71 16 110 M12 x 1.75 10 With Rod Boot With Air Cushion (mm) (mm) (mm) Bore size Rc, NPT port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

Compact Manifold Regulator Series ARM5

VY2 17 VBA VBAT AP100 513 Series ARM11A/B Pressure Switch Block 56 ARM11AW Z A 0.6 0.2 0.4 MPa 20 24 56 q w 0.5 0.1 0.3 1. Accessory 2.

RHC

Refer to page 10-20-60 for details.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

Title not found

Refer to catalog N366 Series Variations @ Boq1" l N m ) L lg) 10 16 20 25 32 40 50 MHY2NOD 10 0 . 1 6 71 70 MHY2N60 1 6 0.54 84 150 MHY2-MD 20 1 . 1 0 106 3m MHY2.25D 2.24 560 MHw2 Rack Style Unique seal design Grippng force when allows shorter total length construction and constant opening and closing fingers.

Refrigerated Air Dryers

, IDF6E-10 IDF8E-10, IDF11E-10, IDF15E1-10 10 A C 100 V type E A IDU3E-10, IDU4E-10, IDU6E-10 IDU8E-10, IDU11E-10, IDU15E1-10 F Power cable outlet (17) (Electric wire diameter 9 to 11) [opposite side] IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E

Pin Cylinders Series CJP2/CJP

, 15, 20, 25 5, 10, 15, 20, 25, 30, 35, 40 5, 10, 15, 20, 25, 30, 35, 40 CJP2 CJP Note 1) A stroke of 20 is available with a standard product only.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

)1/4, 1/8 3-Rc(PT)1/4, 1/8 (P, A, B port) 25.5 41 47.6 54 60 [66.5] 57.1 20 57.1 12 20 11.5 11.5 12 10 10 22 22 63 22 22 63 18 18 (R1, R2 port) 2-Rc(PT)1/4 (R1, R2 port) 2-Rc(PT)1/4 [ ] for AC Other dimensions are the same as the grommet style

JA/JAH/JB/JS

Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement CRB2 MSQB70 MSQB100 CRBU2 80 80 70 70 CRB1 Displacement m Displacement m 60 60 50 50 MSU 40 40 CRJ 30 30 20 20 CRA1 10 10 CRQ2 18 16 14 12 8 6 4 10 2 0 8 6 4 12 10 2 0 Load Nm Load Nm MSQ MSQB200 MSZ 90 80 CRQ2X MSQX Displacement m 70 60 MRQ 50 40 30 20 10 30 25 20 15 10 5 0 Load Nm Rotation Accuracy: Displacement Values at 180 (Reference values) Rotating amount of table

LVQ

(mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150 60 88 10 7 20

CJ5-S

Floating joint: Stainless steel type Series JS For details, refer to Best Pneumatics Vol. 10. 10-14-20