3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1 /02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02
10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.
/N.O. 0.39 0.46 1.4 0.28 0.40 Double 1/4 Note) [ ]: Indicates normal position C10 10 Onetouch fitting Single 53-SY9 20-C10 2position 6.1 1.9 0.28 0.33 1.4 7.9 Double C12 12 Onetouch fitting Single 2position 53-SY9 20-C12 7.0 2.2 0.25 0.41 1.6 8.6 Double 4 Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position single L-type plug connector (L) 53-SY5120-L-01 (-F2) With foot bracket 53-
A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z E C O N F I G U R AT I O N Symbol Port Size Applicable Series Metric (mm) M5 M5x0.8 SY3000 C4 One Touch Fitting 4 SY3000 C6 One Touch Fitting 6 SY3000, SY5000 01 PT 1/8 SY5000 C8 One Touch Fitting 8 SY5000, SY7000 02 PT 1/4 SY7000 C10
Available in 8 standard colors, Available in 2 roll sizes, Maximum operating pressure 0.8MPa at 20¦C TUBING, NYLON T/TIA, TS/TISA. TUBING, CUT LENGTH. 58.70600 lb. G96.
TUBING, NYLON T/TIA, TS/TISA. TUBING, NYLON. 4.75000 lb. G96.
Available in 8 standard colors, Available in 2 roll sizes, Maximum operating pressure 0.8MPa at 20¦C TUBING, NYLON T/TIA, TS/TISA. TUBING, CUT LENGTH. 68.24200 lb. G96.
Available in 8 standard colors, Available in 2 roll sizes, Maximum operating pressure 0.8MPa at 20¦C TUBING, NYLON T/TIA, TS/TISA. TUBING, CUT LENGTH. 5.84580 lb. G96.
Clean series polyurethane tubing: 10 series 4, 6, 8, 10, 12 Symbol Polyurethane tubing: TU series, Nylon tubing: T series and Soft nylon tubing: TS series can also be used. However, the degree of clean performance will decline. Relation between Operating Temp. and Max.
Metal parts material Applicable tubing material Metric size Inch size Seal method Body size Port size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Note) Gasket seal 1 M5 x 0.8 Note) 10-32UNF Note) 1/8 2 Note) Note) 1/4 Sealant R 3 1/4 NPT Brass/ Steel wire 3/8 Nylon (Series T,TIA) Note) Stainless steel 4 1/2 Note) Soft nylon (Series TS,TISA) 1/8 2 Note) 1/4 Polyurethane (Series
S start and next stop, accuracy speCified (depending lIpon Ihe cases, but 300 rom will be the standard) sometimes will nOI come true, please take into consideration. 11 ConSlr1lclion/Pa~ts list e ~-Long stroke design Parts List Notes : I No. Description Notes Material Material No.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean series polyurethane tubing: 10 series 4, 6, 8, 10, 12 Symbol Polyurethane tubing: TU series, Nylon tubing: T series and Soft nylon tubing: TS series can also be used. However, the degree of clean performance will decline. Relation between Operating Temp. and Max.
ASF Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline. Relation between Operating Temp. and Max.
Metal parts material Metric size Inch size Applicable tubing material Model 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 12 10 8 6 4 3.2 AS1002FS Nylon (T, TIA series) AS2002FS Soft nylon (TS, TISA series) Brass AS2052FS Stainless steel Polyurethane (T, TIUB series) Fluoropolymer (TLM, TILM series) (TH, TIH series) AS3002FS AS4002FS Made to Order (Pages 3, 8) Restrictor Flow control of air blow and
Metal parts material Applicable tubing material Metric size Inch size Seal method Body size Port size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Note) Gasket seal 1 M5 x 0.8 Note) 10-32UNF Note) 1/8 2 Note) Note) 1/4 Sealant R 3 1/4 NPT Brass/ Steel wire 3/8 Nylon (T,TIA Series) Soft nylon (TS,TISA Series) Note) Stainless steel 4 1/2 Note) 1/8 2 Note) 1/4 Polyurethane (T,TIUB
Applicable tubing material Metal parts material Metric size Inch size Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 2 Gasket seal M5 x 0.8 1 2 10-32UNF 2 1/8 2 2 2 1/4 R Sealant 1 1/4 NPT 3 3/8 2 1/2 4 2 Brass/Steel wire Nylon (T, TIA Series) 1/8 2 2 1/4 Stainless steel Soft nylon (TS, TISA Series) G 1/4 3 3/8 Face seal Polyurethane (T, TIUB Series)
pressure: 0.025 MPa 686 686 REC Test cylinder Load converter 588 588 Theoretical thrust CX Theoretical thrust 490 490 Thrust (N) Thrust (N) Analyzing recorder Actual thrust Actual thrust 392 392 CY Pressure converter Measuring Conditions 10-CQSXB20-50D 294 294 MQQ M Chamber volume Purity of air supplied to chamber 15 l Same quality as supply air Hitachi Electoronics Engineering Corporation TS
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.