F

21 33.5 1/4 3/8 KQW07-U03 17.46 13.2 10 20.5 42 42.5 17 4.6 10 38 KQW10-U03 17 18.5 17 26.5 52.5 56 21 33.5 5/16 1/8 KQW09-U01 12.7 15.2 12 23.5 40 43.5 18.5 6 10 12 KQW10-U04 22 18.5 17 26.5 54.5 56 21 33.5 5/16 1/4 KQW09-U02 14.29 15.2 12 23.5 45 47 18.5 6 12 14 KQW12-U02 17 20.9 17 28.5 54 58.5 22 47.7 5/16 3/8 KQW09-U03 17.46 15.2 12 23.5 45.5 47 18.5 6 12 38 KQW12-U03 17 20.9 17 28.5

MU

MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4-4 Plate Cylinder/Double Acting Single Rod Series MU Dimensions (mm) ZZ 109 122 133 159 169 LY 56

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

<131> 54<55> (Lead wire length) 60<61> 49<52.5> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-39 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 2 position single 0 1 01 02 Grommet(G): VQZ215 (R)lGl 300 84.5 (Lead wire length) 2-4.5Mounting holes 54.5 24 9 9 R4 13 A 4 B 2 15 34 SMC Cover diameter 1.6 Cross section 0.34mm2 R2 R1 5 1 P 3 Manual override 56

MGP

A B C 50 56 72 82 98 106 130 142 180 210 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 D By-pass port dia. M5 x 0.8 M5 x 0.8 C 0.2 M6 x 1.0 [Bottom mount] M8 x 1.25 B 0.2 B Pin hole M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 A 0.2 3.

MXS

Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions.

Brake mechanism added

59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

CG5-S

18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 22 22 32 32 I-G10SUS Y-G10SUS 100 100 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin

Slider Type/Ball Bushing Bearing

50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated by the workpiece

Micro Mechanical Valve Series VM1000

T.T. 6 2 x M20 x 1 Lock nut Thickness 6, Width across flats 27 Max. 10 Symbol 2 port 56 (A) 2 23 R port (3 port only) 52 33.5 12 10 1 (P) (108) 3 port (A) 2 22 13 12 10 32 1 (P) 3 (R) 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 30 25 F .O.F .* 56 N P .T. 3.5 mm O.T. 2 mm T.T. 5.5 mm 40 16 Series VM200 Series VM200 Toggle lever VM220-02-08A VM230-02-08A Panel mounting hole T.T. 6 2

IDG

Example: Assuming that IDG30 is chosen The inlet air flow rate Q1 = 150 + 56 = 206 l/min (ANR) by Step 4 Outlet air flow rate 150 l/min (ANR) Example From table below (Inlet Air Temperature Correction Factor for Outlet Air Flow rate) Correction factor for outlet air flow rate is 0.40 for Type A products group 0.86 for Type B products group Purge air flow rate 56 l/min (ANR) Compressed air

MNB

40 41 30 20 177 170 20 37 Bore size (mm) LD LH T V VA W ZZ S J K MM N P Q H LS LT LX LY LZ Y X 32 154 9 1/8 30 198 3.2 32 47 22 232 M6 x 1.0 57 6.5 13 37 34 27 50 M10 x 1.25 7 6 6.5 40 161 11 1/4 33 209 3.2 38 51 24 247 M6 x 1.0 64.5 9 41.5 16.5 39.5 27 M14 x 1.5 55 9 6 8 50 183 11 1/4 40 237 3.2 46 58 27 279 M8 x 1.25 77.5 10.5 20 47.5 47 31.5 70 M18 x 1.5 9 7 9 63 197 14 3/8 48 251 3.6 56

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

Integrated Controller

)[54]4 54[(56)]4 Stroke Setup communication connector (M12) Parallel I/O connector (M12) Opposite end [Origin end]4 Origin end3 [Opposite end]4 58 (4)[2]4 2[(4)]4 38 Power supply connector (M12) 15 27.8 (48) 24 22 38.5 60 6.5 28.6 6 M4 x 0.7 thread depth 8 (F.G. terminal) D x 120 (= E) B + Stroke F 10 3 H9 (+0.025 0 ) depth 3 120 n x 4.5 4 Motor mounting position: Left side parallel Motor

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16

MNB

GE VA Rc P Head side cylinder port S + Stroke H C 4-FD A K BN F GF GB Width across flats B1 Cushion valve 4-J Effective thread length MM H1 Q V D E B FB FY FT N FX FZ Width across flats ZZ + Stroke Width across flats Bore size (mm) Stroke range (mm) A Effective thread length (mm) FB FD FT B B1 H1 BN BP C D F FZ Ee11 FX FY GA GB GC GD 32 45.5 83 13 87 6 72 7 32.5 1/8 97 19.5 Up to 500 54 56

CG5-S

18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22 22 32 32 31 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 IY-G10SUS Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring

CM2

56 56 57 62 53 53 54 59 49.5 49.5 50.5 55.5 55 55 56 61 53.5 53.5 54.5 59.5 51.5 51.5 52.5 57.5 101 to 150 75 75 76 81 81 81 82 87 78 78 79 84 74.5 74.5 75.5 80.5 80 80 81 86 78.5 78.5 79.5 83.5 76.5 76.5 77.5 81.5 151 to 200 101 106 107 112 104 109 100.5 105.5 106 111 104.5 109.5 102.5 107.5 200 to 250 131 137 134 130.5 136 134.5 132.5 25.5 28 31.5 35.5 22.5 25 28.5 32.5 25

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin