Function: 2 Position Single, Sealant: Metal Seal, Pilot Valve: -COM, Voltage: 24VDC, Lead Wire: L Plug w/o Connector, Manual Override: Non-locking Push Style, Port Size: ø6 One-touch Fitting

Function: 2 Position Single, Sealant: Rubber Seal, Pilot Valve: -COM, Voltage: 24VDC, Lead Wire: L Plug w/o Connector, Manual Override: Non-locking Push Style, Port Size: ø6 One-touch Fitting

Function: 3 Position Closed Center, Sealant: Metal Seal, Pilot Valve: Standard (1W DC, AC), Voltage: 24VDC, Lead Wire: L Plug w/o Connector, Manual Override: Non-locking Push Style, Port Size: ø6 One-touch Fitting

Function 1: -, Seal Type: -, Function 2: -, Voltage: -, Lead Wire: -, Manual Override: -, Port Size: -, Q: -

Function 1: -, Seal Type: -, Function 2: -, Voltage: -, Lead Wire: -, Manual Override: -, Port Size: -, Q: -

Function 1: -, Seal Type: -, Function 2: -, Voltage: -, Lead Wire: -, Manual Override: -, Port Size: -, Q: -

Function 1: -, Seal Type: -, Function 2: -, Voltage: -, Lead Wire: -, Manual Override: -, Port Size: -, Q: -

Function 1: -, Seal Type: -, Function 2: -, Voltage: -, Lead Wire: -, Manual Override: -, Port Size: -, Q: -

Function 1: -, Seal Type: -, Function 2: -, Voltage: -, Lead Wire: -, Manual Override: -, Port Size: -, Q: -

Type of Actuation: 1 (2 Position Single), Manifold Type: 60 (Body Ported Plug-in Cassette), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting)

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Symbol: C5 Applicable to single vane style only Symbol: C6 Applicable to single vane style only Start of rotation is 45 up from the bottom of the vertical line to the left side. Rotation tolerance for CRBU2W10 is . A parallel key is used instead of chamfer for size 40. Start of rotation is 45 up from the bottom of the vertical line to the left side.

Model Selection 1

Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C. (normally closed) only. 17-1-2 17-1-3 2 Model Selection 2 Equipment for Controlling Fluids Model Selection 2 According to the model selection guide below, refer to number of port, valve style (N.C./N.O.

VQZ100/200/300

VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port size {2(A)port} (A) 2 N.C.

Series: VQ2000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: FN (F + N)

Series: VQ1000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: F (Bracket)

Series: VQ2000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: F (Bracket)

Series: VQ1000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: FN (F + N)

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

7.4

1(P) 3(R2) 3(R2) OUT side port size Option IN side port size Nil None D DIN rail mounting (For manifold) F With bracket N With name plate C4 4 One-touch fitting M5 M5 thread C3 3.2 One-touch fitting C4 4 One-touch fitting Note) When multiple symbols are specified, indicate them alphabetically.