SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

3 Port Air Operated Valve

thread) (5.4) 12 (35) 36 35 31 25 (17.5) 16.5 (45) 26.2 15 (20.9) (Distance between ports) 2.8 (54.5) 1/8, 1/4 1(P), 3(R) port 4.5 1P 26.5 NO 3 3R M5 x 0.8 (Breathing hole) 16 20.4 53.7 01 02 A B For vacuum/VPA342V-1(-F) 1/8, 1/4 2(A) port 26.2 2 x 3.2 (For mounting) 21.5 NC 2A 3.4 (1.6) 20.4 16 65.2 (9) 2 x 3.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (35)

Low Profile Guide Type

+ Stroke) Q + Stroke CY1F 4 x MM thread depth ML (LL) LA 6 x YA recessed area Note 2) XAH7 PA Adjustment bolt Max. approx.

Series IDG

(N) (P) N.O.: Black N.C.: Gray Thread size: 1/4 Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 17 M5 x 0.8 With auto drain Differential pressure type Float type With drain guide Port size A B C D E F G H J K L M N Q Model P 224 45 11 275 59 14 5.5 133 158 188 228.5 78 179.5 8.5 185 244 269 365 87 30 24 201.5 IDG3V, 3HV, 5V, 5HV IDG10V, 10HV 1/8, 1/4 263.5 7 92.5 222.5

Thermo-chiller

The indicated value is in (C). e [PRS] lamp Turns ON when the pressure is indicated by q. The indicated value is in (MPa). r [FLOW] lamp Not used in this product t [DI] lamp Turns ON when electric conductivity is indicated by q.

Compact Cylinder

RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10 5 0.8 45 39 10 12 40 5.5 M6 x 1.0 48 10 6 26 4.5 M5 x 0.8 7.5 13 10 5 0.8 6 Series C55 Dimensions 32 to 63 2-G1/8 Port size Auto switch Z Q F 2 x 4-OB counterbore RB H thread effective depth C J E I 4-N through T D M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5

VCB

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

VCB

Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5

2 Phase Stepper Motor/Without Motor Brake Series LXS

Stroke + 246 75.5 59 LXSH S B Q F G x I Without brake 5H9 +0.030 0 depth 5 D-5.1 through Refer to Cross section C-C, bottom view. 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 32 5 M3 x 4l E-M5 2-M3 x 0.5 Effective thread depth 4 (PE terminal) 6 Thread depth 10 Crimping terminal 38 76 46 Toothed lock washer (included) Motor wire (300mm) Photo micro sensor wire (300mm) Phillips

Rotary Cylinder Series MRQ Size: 32, 40 1

Width across flats 12.2 2-M5 x 0.8 (Plug, Back side) Port size (Rotary motion) 113 (Rotating angle 180: 144.5) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch Linear motion Rotary motion 4-M5 x 0.8 depth 7 A port Port size (Linear motion) Port size (Rotary

RQ

Example) Bolt M5 x 50l 4 pcs.

MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !

3-Position Rotary Table

S SC SD SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M4 x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D Q 2-P T B U W S E K L AA I J R A X AP Y + Stroke AB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V Z + Stroke Non-lock type Lock type 8-AF AC AD AE Rod end lock Q Y + Stroke R Head end lock Dimensions not marked with an are the same as standard.

Actuation: 3 Postion Exhaust Center, Piping/EXH: Body Ported, Coil Specifications: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/ Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Port Size: M5 x 0.8, Thread: -, Bracket: -

Actuation: 4 (3 Postion Exhaust Center), Piping/EXH: 23 (Body Ported), Coil Specifications: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: M5 (M5 x 0.8)

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures