A_HEC-OM-J017

deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F

25

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more).

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

Digital Flow Switches

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

SYA3000/5000/7000

Model/Series SYA340 (Base mounted) Valve model Type of actuation Port size Flow characteristics Note 1) Mass Note 2) Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) (g) Cv b Cv C (dm3/ (sbar) ) C (dm3/(sbar) ) 69 (34) 71 (36) Single Double 2 position 0.30 1.0 0.24 1.1 0.30 0.26 0.28 0.18 0.85 0.30 0.77 M5 x 0.8 0.19 Closed center Exhaust center Pressure center SYA340-01 1 8 3 position

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Non-locking) 1/8 (P , EA, EB port) 1.8 (Ventilation hole) 2 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center/exhaust center/pressure center SYA5 20(-F2) C4, N3 C6, N7 C8, N9 3 4 5 1/8 (A, B port) 2-M5 x 8 (Pilot port) 2 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" 2 3.2 (For mounting

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

Series: 250 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: A (Brass Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: A (Brass Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: A (Brass Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

KR

Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. 603 AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D.

Stainless Steel One-touch Fittings Series KG

(mm 2) Weight (g) A Applicable tube O.D.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Note 2) Brass parts are all electroless nickel plated, provided as standard. Elbow type How to Order AS 2 2 1 1 F 01 06 S T Tamper proof Speed Controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1. With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.