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bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Symbol 01 02 03 04 06 Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Orifice size Please consult with SMC regarding other voltages.

8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

XT661-2A: F = f x (1/t) = 0.8 x (1/2) = 0.4 N XT661-4A: F = f x (1/t) = 3.8 x (1/2) = 1.9 N XT661-6A: F = f x (1/t) = 5.9 x (1/2) = 2.95 N XT661-8A: F = f x (1/t) = 7.5 x (1/2) = 3.75 N XT661-10A: F = f x (1/t) = 14.4 x (1/2) = 7.2 N 9700 g 9700 x 9.8/1000 = 95.06 N XT661-10A: Temporary lifting force 11.2 N < Workpiece mass 9700 g (95.06 N) 3) Confirm the relationship temporary lifting force

Laser output power 3 [kW], conversion efficiency 30% The oscillators power consumption is, 3 [kW] 0.3 = 10 [kW] The cooling capacity required for the oscillator is, 10 [kW] 3 [kW] = 7 [kW] Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] W Efficiency Q = P = In this example, using an efficiency of 0.7: 5.1 0.7 = = 7.3 [kW] Q: Heat generation amount Cooling capacity = Considering

SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3(EB) VPA VPA3 3 position closed center/exhaust center/pressure center t q Symbol 3 position closed center (A) 4 (B) 2 w 2(B) (A)4 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 3 (EB) 5 (EA) 1 (P) r (EA)5 1 (P)

Refer to the Specific Product Precautions for the replacement period. 1517 A CY1L Series Construction Slider type/Ball bushing bearing CY1L6 $0 #9 #3 @2 t #4 !9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !

2 Cover cap screw 45 G 40 CKZT-S040 Note 1) T P Switch cassette 60 F 75 E 90 D q Stay o Spring washer !0 Socket head cap screw 105 C CKZT-D040 Note 2) 120 B Kits for changing opening angle of arm CKZT-B040 Note 2) w Stopper bolt r Bumper !1 O ring 135 A 40 CKZT-K040 Note 2) CKZT-D040 CKZT-B040 t Top cover !3 Spacer !4 Short head cap screw !

A D E Ventilation direction Compressed air inlet Illuminated switch Compressed air outlet J F G Evaporation thermometer Ventilation direction C Ventilation air inlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H N M K L Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size 3/8 8.9 [226] 16.1 [410] 18.6 [473] 2.6 [67] 4.9

OUT 54 L G 8.5 H (F) (E) (352) 10.5 Purge air for dehumidification M5 female threads Drain (Maintenance space 100mm or more) Drain discharge With float type auto drain With drain guide Q P N.O.: Black Thread size: 1/4 (without valve mechanism) Width across flats 19 Applicable tube O.D.: 10 (NPT threads: 3/8 inch) With float type auto drain With drain guide Port size A B C D E F G H K L M

3 and !5 and 1 piece of no. !4 MXPJ6 No. Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30

ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS q End block R w 1 End block L e ZQ13M-Note) Ejector assembly r ZQ-3-005 ZQ-3-009 Ejector body gasket for manifold t Exhaust block gasket y Note) Refer to page 13-9-5 for detailed description of How to Order. How to Order Hexagon Socket Head Cap Screw Working Procedure Disassembly Loosen and remove the hexagon socket head cap bolts q. Assembly 1.

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Refer to page 41 for how to return to the locked state. 10 MWB Series Construction io w er uy q !3 !4 !2 !8!5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

7 i q @0 w y @1!8t @2 q !1 !0!3 o r !4 !5 !9u !2 CHM CHS CH2 CHA CHA @0 Related Products D40 Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.