Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

SL5200

1 H 2 4 Sample Order Number Port w q w q w q SL5802S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 V3 V3 MPA MPA 2PW 3PW 4PW 1 1) Other range available.

Vacuum Pad

Q = (V x 60) /T1 + QL = (0.0031 x 60) /0.3 + 0 = 0.62 L From the formula on the front matter 8, the maximum suction flow rate Qmax is Qmax = (2 to 3) x Q = (2 to 3) x 0.62 = 1.24 to 1.86 L/min (ANR) According to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0.5 diameter can be used.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Slider Type Ball Screw Drive/11-LEFS Series

plug connector*3 MJ LECPMJ*2 *3 !

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

VEX1

, with lead wire L plug connector, without lead wire L plug connector, without connector M plug connector, with lead wire M plug connector, without lead wire M connector, wihtout connector DlN connector 1 8 1 4 1 4 3 8 1 2 1 2 3 4 12 L LN 12 LO 32 M 32 MN MO 50 D 1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet

RSH/RS1H

With cancel cap With lever detection switch Q Note 2) Direction of transfer Note 1) Options can be combined.

RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PNP open collector 2 outputs Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Panel mounting Specifications for Display Unit PF2D300/301 Model 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Flow rate measurement range Note 1) 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Set flow rate range Note 1) 0.05 l/min 0.1 l/min 0.5 l/min Minimum set unit Note 1) Accumulated

CHKD/CHKG

x Rc P CHQ Width across flats f c CHK CHK R R CHN CHM g e b a CHS 20 to 25 h + Stroke CH2 Q Q Rod end male thread ZZ + Stroke CHA Related Products F with effective thread depth G DC H 2 x K through 4 x L counter bore M 4 x CD LW D LH LT B + Stroke X1 X1 E LX BB Y1 SS Z + Stroke LA + Stroke 32 to 100 (mm) Bore size (mm) LA B BB C F L CD D E G H K LH LT LX 20 25 32 40 50 63 80 100 76 6.6 9.5

VK3000

(Bottom ported) VV5K3-40Station -M5 Grommet: G DIN terminal: D 6 x Rc1/8 (P,R port) (Pitch) 6 x Rc1/8 (P,R port) 14.5 14.5 21 42 Max.10 74.1 7.5 7 2 x 4.5 (Mounting hole) (Lead wire length) Corresponding mark ( ) Corresponding mark ( ) Pg7 69.9 Manual override (Non-locking) ~ = 300 77.4 Applicable cable O.D.: 3.5 to 7 (Pitch) 2n x M5 x 0.8 (A,B port) L Dimension n: Stations n L 1 50 27 2

CXT

22 122 17 2 127 32.5 11 5.5 * PA dimension is the center sorted factor of the L dimension.

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

240

2 2 Lead 5 (LEPS10(L)K) LEH 1.5 Lead 10 (LEPS10(L)J) 1 1 LEY -X5 Lead 10 (LEPS10(L)J) 0.5 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 11LEFS 200 200 11LEJS Set Value of Pushing ForceForce Graph (Guide) 25ALEPS6 (Basic) LEC 25 LEC S Lead 4 (LEPS6K) 20 LEC SS-T Force [N] 15 Lead 8 (LEPS6J) 10 LEC Y 5 Motorless 0 70 80 90 100 Set value of pushing force [%] LAT Set value of pushing

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20