C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

Low Profile Guide Type

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static Moment Ceiling mounting Horizontal mounting Wall mounting M2 M1 M1 M2 M2 M3 y x y x z x Y Y X X X Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M3 M1 CY3B CY3R m3 x g x Z m1 x g x Y m2 x g x Y

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Plug-in Unit

(arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No.

air-filter-e

Replacement Parts and Seal List AIR VENT DRAIN y Plug u O-ring w Cover IN OUT t Element r O-ring e V-band i Upper element holder q Case o Lower element holder !4 Intermediate holder (L-129S) Note) Installed only for FQ1012 when two L250 elements are used. !0 Spring !3 O-ring !2 Quick plug *BLUE links will lead to purchase pages.

Air Preparation Equipment

Replacement Parts and Seal List AIR VENT DRAIN y Plug u O-ring w Cover IN OUT t Element r O-ring e V-band i Upper element holder q Case o Lower element holder !4 Intermediate holder (L-129S) Note) Installed only for FQ1012 when two L250 elements are used. !0 Spring !3 O-ring !2 Quick plug *BLUE links will lead to purchase pages.

CXS

3 y !1 e q !3 y !1 q @7 MG CXSJM20 to 32 CXSJL20 to 32 CX @5 !6 i u !7 o !5 t r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 D-X 20Data Rod cover Head cover Rod cover Head cover Component Parts No. Description No. Description Material Note Material Note Hard anodized Aluminum alloy Polyurethane q !6 Housing Bumper B Hard chromium electroplated Carbon steel NBR w !

CXS

3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

reduces flow setting time

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

w e r t y u i o !

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

SZ3000

If connections are made incorrectly, failure may occur not only in the manifolds and valves, etc., but also in the PLC (control side) and power supply, etc. 9 Series SZ3000 Construction JIS symbol 2 position single 2 position single w e q r t y u o !0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !

MLU

8 RLQ MLU ML1C DB At the time of shipment -X @7 20Data Retraction locking C M(D)LUB25 Component Parts Description Material Note Description Material Note No. q w e r t y u i o !0 !1 !2 No. !5 !6 !7 !8 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

ZQ

Table (1) Combination of solenoid valve, pilot valve and power supply voltage Applicable power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How