Speed Controller: Standard Type Series AS In-line Type 0 i y r u e t r i !0 q y !3 !2 !1 o w !3 e t w o u !4 y q !2 AK ASS ASR ASF Meter-in type M5 type U10/32 port AS3210-02 Component Parts No. Description Material Note No. Description Material Note Body A O-ring Zinc alloy NBR q i Body B O-ring Electroless nickel plated Brass NBR w o Needle Bushing Electroless nickel plated Brass PBT e !
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
No gauge port psig/bar unit MPa unit No code Porting Configuration No pressure gauge (Connections: 1/4 inch face seal male) 0 r r e V3 L 1 2 4 10 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa Sample Order Number Port w q w q w q SL5406S e q FV4 FV4
3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B
When the inlet pressure is 0.4 MPa: 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 8 Series VBA Construction/Replacement Parts VBA10A VBA11A q r e w t r e u q t w VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q t y r w e q VBA22A, 42A Replacement Parts/Kit No.
3 w t y q i o e u t y q i o e u w !0 !0 !9 Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread r !8 !4 !6 !7 !5 !1 !2 w t y q i o e !0 u @0 Meter-in type Meter-out type Component Parts No.
15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/
q i w t ARJ y AR425 to 935 w r ARX t AMR e ARM ARM u y u q i ARP IR-A r o Replacement Parts Component Parts IR Description Material Part no.
Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4
> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .
Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,
Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.
Handle element e carefully to keep it clean, for example, open the element package only when the element is mounted. a. Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d.
Handle element e carefully to keep it clean, for example, open the element package only when the element is mounted. a. Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d.
Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The
2 Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V A Servo motor (24 VDC) V V LECA6 r Lead [mm] Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8 10
w e r t y u i o q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.
10 Q S 6 H7 depth 10 GC GB 2 x P 2 x P (Plug) PB T-slot GA JC PA + Stroke JB JA J K G FA A + Stroke B + Stroke FB C + Stroke E The use of a slot (width X6, length 7, depth 5) allows for a relaxed pin pitch tolerance, with the pin hole (6H7, depth 10) as the reference, without affecting mounting accuracy.
Model Connection threads R/NPT M L1 L2 H G F M E A B 1/8 LQ1R12-M LQ1R11-M 3 4 2 12 18.5 11.5 10 4 15.5 8 1/8" Class 1 LQ1R43-M LQ1R42-M LQ1R41-M LQ1R36-M LQ1R35-M LQ1R34-M LQ1R33-M LQ1R32-M LQ1R31-M LQ1R24-M LQ1R23-M LQ1R22-M LQ1R21-M 12 10 12 6 8 10 6 8 10 4 6 4 6 19.5 1/8" 4 16 28 16.5 15 6 12 14 22 1/4" (E) 2-B L1 M 19 1/4" 25 F 5 36.5 23 20 9 18 17 1/4 G H 21 3/8" 27 (A) (E) Class 2
Bore (mm) Stroke range (mm) A 25.5 25.5 29 32.5 I OB K Q L RA M RB N T C OA D E F H B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 M3 X 0.5 M4 X 0.7 M5 X 0.8 M6 X 1.0 M4 X 0.7 M4 X 0.7 M6 X 1.0 M6 X 1.0 32 38 47 52 6.5 6.5 9 9 5 6 8 10 7.5 7.5 9 11 3.5 3.5 4.5 5 7 7 10 10 15.5 20 25.5 28 4 4 7 7 3.5 3.5 5.4 5.4 0.5 0.5 1 1 6 8 7 12 6 8