Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

D 5 D 5 Individual SUP block assembly Individual EXH block assembly U side D side U side D side B A B A B A B A B A B A B A B A P P R R P R [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold specification sheet.

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

LEC-OM07605CN

B1 B1 VAR U B DC24V VAR U B DC24V B2 B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Vacuum Unit

pages 11 and 12, and r on page 13.)

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/>B ' C . 0 E . F.

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

2/3 Port Valve

) V, R R (Non-leak) T Aluminum, Silver Insulating oil A Polyacetal B Non-leak (105atm cc/sec or less) V, R Aluminum, Copper V(Non-leak) X Perchloroethylene A H Stainless steel Brake oil B Helium V Note 1) Grease has been applied to the core part of option symbol "D" and "Standard".

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.

CJ2

1 Stainless steel NBR Piston seal Piston rod r !2 Brass NBR Rod seal Piston A t !3 Brass NBR Tube gasket Piston B y !4 Zinc chromated Piano wire NBR Piston gasket Return spring u !

VQ5000

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

5 Port Air Operated Valve

q e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5

Title not found

Manual override Nil: Nonockins push type 'oltage suppressor wrh ---'l ,hl wth sfige voftageJUepresd B: Lock ng iype (s oned) lD tr]]i\ -r1.LrF-r }pos lDn qhausl cn1er . t_tr-r fll, r-itr'Lt lir. ,L]! gpos ton pressure center ]]-trr\i rt it, rN !fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ?

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

VQC

Individual EXH spacer VVQ2000-R-1-C8 EXH shutoff position: Specify 2 positions. SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.