35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !
SD RD 24V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24V 0V 24V 0V +24V 24G DA DB DG FG LED name LED name LED name PWR Content Content Content Green light turns on when line power is input Turns on during supply of communication power, turns off when there is no input Turns on during supply of communication power, turns off when there is no input PWR PWR Light off: When unit is off-line or power
Also, the mounting surface should be smooth (Recommended surface roughness: Rz 25 or less). When using the product without piping (body ported), seal the side port with the attached plug. When piping from the side, cover the supply port on the top of the product with the mounting surface.
.] : With indicator tight aod surge vo(ags $up0re6sor < ) :3Dosition @ NVF 3OOO, 5OOO Precautions Indicator light/Surge Voltage Circuit Voltage Circuit Model Grommet(c) Grommet terminal(E).Conduit terminal(T), OIN connector(D) Surge Voltage Suppressor Circuil U GS "--ffi_=r e+--,-1 *"-,..01$A|l ilrr i*Ti $i= *Ejlll,o .itJj rljo Lamp, Surge Voltage Suppressor Circuit E7, rZ, DZ EZ, rz, Dz
.] : With indicator tight aod surge vo(ags $up0re6sor < ) :3Dosition @ NVF 3OOO, 5OOO Precautions Indicator light/Surge Voltage Circuit Voltage Circuit Model Grommet(c) Grommet terminal(E).Conduit terminal(T), OIN connector(D) Surge Voltage Suppressor Circuil U GS "--ffi_=r e+--,-1 *"-,..01$A|l ilrr i*Ti $i= *Ejlll,o .itJj rljo Lamp, Surge Voltage Suppressor Circuit E7, rZ, DZ EZ, rz, Dz
DJ x 1.6 III Detecting assembly gasket NBR I Note) A detecting rod assembly(BS-2) is required to operate the switch. When a switch is fitted, a detecting rod assembly is attached. When a switch is unnecessary, a blanking plug (BS-1) should be fitted. 65-2 Detecting rod assembly Part No.
) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:
+ Stroke BA 2-BT (mm) Stroke range Model A BY D GW GY H H1 B1 C B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37
BS Displays the Communication status. BE Displays the Communication error L/A1 Displays the communication status of the BUS IN side. L/A2 Displays the communication status of the BUS OUT side. ST(M)-LED LED display Content OFF The power supply for control and input is OFF. Green ON Normal operation. Diagnostic error of I/O unit is detected.
+ Stroke BA 2-BT (mm) Stroke range Model BY C D GW GY H H1 B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY A B1 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8
Interactive input display Programming with the same language as PC software ACTUATOR & CONSTRUCTION SYSTEM L c /BS HOLD STOP CONTROLLER POWER ALARM L R UP ENT DOWN /ESC MODE Able to execute operations such as programming, test runs and parameter changes, which up until now have been performed from a PC.
Op onal pitot connction In junctlon box and laroe lapped junction box cover allow looic control tubes to bs run Into the,unction box through electricat conduiir alJ hose usd as conduit, lhus avoidlng exposd control tubes. Junclion box i9 splash-proof and o -tight.
B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix
150 G Rz JIS 3.2 A Adsorption surface area Closeup picture Adsorption surface cross-section Adsorption surface 1 mm Parallelism 30 m Adsorption surface Mounting surface Superior surface parallelism of the adsorption surface and body part surface allow for highly precise mounting. 750 substrates, and soft workpieces.
The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/
The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8