ZX

Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

CC-Link-E

S. ) Bi t dat a area O u tp u t b i t d ata Bi t dat a area In p u t b i t d ata R Y00 to R Y0B Set val ue of hol di ng pressure f or error N ot e R X00 to R X0F U nused R X10 to R X19 I nval i d ( area of syst em ) RY0C, RY0D U nused RX1A Fl ag f or error RY0E Banned f or use RX1B Rem ot e READ Y R X1C to R X1F I nval i d ( area of syst em ) RY0F 0: RY00 t o RY0B i nval i d dat a 1: RY00

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

1/4 3(R) port VQ 43.5 11 The broken lines indicate the DIN rail mounting style [-D].

Single Axis Electric Actuator Series LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

Rotary Gripper Series MRHQ

D-F9B Perpendicular D-F9BV D-F9N Auto switch part no.

Vacuum Pad: Ball Joint Type

Q 8 3 5 Y Applicable tubing O.D.Q R R F F Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 3 E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) B (mm) B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 12.5 15.5 29.3 46.5 10.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

CHKD/CHKG

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 32 to 100 20, 25 B B D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-Y5 D-Y7 D-Y7W D-Y7BA D-Z7 D-Z80 A B MA B MA A D-M9V D-M9WV D-M9AV D-Y6 D-Y7V D-Y7WV D-A9V D-M9V D-M9WV D-M9AV D-A9V A A Auto Switch Proper Mounting Positions (mm) Solid state auto switch Reed auto switch D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA

KN Series Nozzles for Blowing

High efficiency nozzle/KNH (mm) Model Nozzle size D Connection thread L1 A Width across flats H1 Connection thread Weight (g) KNH-R02-100 KNH-R02-150 KNH-R02-200 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 38 38 38 D H1 A L1 Reference dimensions after R thread installation. The air blow thrust is improved by 10%.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Tighening torque of 0.3 to 0.4 Nm) VZS A VFS Circuit with light VS AC circuit DC circuit VS7 1 2 1 2 NL: Neon light R: Resiser LED: Emitting diode R: resister NL R R LED Valve Mounting B Fitting and Silencer Part No. for P, R Ports When Using Valve as an Individual Unit After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque

Compact Cylinder with Air Cushion

A A' A' R H R H Piston seals Wide size variations from 20 to 100 Model Counting Rod end configuration Standard stroke Auto switch 15 20 25 30 40 50 75 100 R(D)Q20 R(D)Q25 20 to 100 Direct mount auto switch 32 to 100 rail mount auto switch Through hole Double end tapped Foot type Front flange type Rear flange type Double clevis type R(D)Q32 R(D)Q40 Female threads Male threads R(D)Q50 R(D)Q63

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Floating Joint

(mm) Model Order no. d: Thread nominal size H B C JS10-4-070 JS16-5-080 JS20-8-125 JS32-10-125 JS40-14-150 JS63-18-150 M40.7 3.2 8.1 DA00127 7 M50.8 4 9.2 DA00128 8 d M81.25 5 15 DA00036 13 M101.25 6 19.6 DA06 17 C M141.5 8 25.4 DA00186 22 M181.5 11 31.2 DA00188 27 H B D-X Technical Data 1157 JS Series Dimensions JS10, 16 M M Center of sphere U D J U F B C E G P H A R Use the precision spanner

Refrigerated Air Dryer

G A HAA HAW E B AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E

Power Valve: Economy Valve Series VEX5

Port 3 (R) 1/4 (P1) Refer to page 2449. 2 x port size Port 2 (A),1 (P) 2 x d Mounting hole A (Air operated) For bracket mounting Max. O Min.