Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

Pulse Valve

MOperation sequence diagram M Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 s OFF for 2 s Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 s 1 s tA tA 1 s CH1 2 s 2 s 2 s 2 s OFFt 1 s 1 s 1 s 1 s CH2 2 s Two-time hitting 1 s CH3 2 s 1 s CH4 Power switch ON (Output start) Power switch OFF (Output stop) Cascade Connection (Multiple-board

Vacuum Unit

V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 37 Vacuum Unit ZK2mA Series Dimensions: Single Unit A B G For high-noise reduction silencer exhaust For port exhaust ZK2 K m mmWA-m K to S E2, 3 Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16") E Exhaust port Ejector system,

CLQ

M E J 4-N through L G B + Stroke A + Stroke S Retraction locking LOCK V1 For retraction locking (mm) V1 30.5 35.5 40.5 Bore size (mm) 63 80 100 BP unlocking port (unlocks when pressurized) Dust cover (manual unlocking unit) Rod end male threads H1 For rod end male threads (mm) C1 26 32.5 32.5 X 28.5 35.5 35.5 H1 M18 x 1.5 M22 x 1.5 M26 x 1.5 L1 33.5 43.5 43.5 H2 11 13 16 Bore size (mm) 63

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

PF-OMM0004_C

1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -66No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 210 g 260 g 410

CLQ

M E J 4-N through L G B + Stroke A + Stroke S Retraction locking LOCK V1 Retraction Locking Bore size (mm) V1 30.5 35.5 40.5 63 80 100 BP Unlocking port (Unlocked when pressurized) Dust cover (Manual unlocking unit) Rod end male thread H1 Rod End Male Thread Bore size (mm) C1 X 28.5 35.5 35.5 H1 M18 x 1.5 M22 x 1.5 M26 x 1.5 L1 33.5 43.5 43.5 H2 11 13 16 63 80 100 26 32.5 32.5 Rod end nut

Table of Contents

RB1412 6 6 7 12 12 10 12 14 17 MY1M25 MY1M32 MY1M40 66 80 91 6 6 6 54 67 78 13 16 17.5 MY1M50 MY1M63 6 6 40 52 20 26 66 77 26 31 5.5 5.5 73.2 73.2 15 15 13 (Max. 33) 13 (Max. 38) 128 152 RB2015 RB2015 With high load shock absorber + Adjusting bolt h TT h h MY1M H Stroke Bore size E F EA F EB MY1M16/20 W FC FB FW Stroke adjusting unit F (Shock absorber stroke) S Shock absorber Workpiece

5 Port Solenoid Valve Series SY3000/5000/7000/9000

VQ5 Rated voltage For DC VQC 5 24 VDC 6 12 VDC Electrical entry for D, Y VQZ V 6 VDC Nil Without light/surge voltage suppressor S Z With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) S 5 VDC R 3 VDC SQ For AC ( Hz) 50 60 DOZ and YOZ are not available. For AC voltage valves there is no S option.

Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Double, Voltage: 200VAC/50Hz, 230VAC/60Hz, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Double, Voltage: 12VDC, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 2Z (200VAC/50Hz, 230VAC/60Hz), Pilot: V1 (External Individual Pilot Exhaust)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 4EZ (12VDC), Pilot: V1 (External Individual Pilot Exhaust)

ZP

B08 B10 B15 2 3.5 4 5 6 8 10 15 N S U F GN GS Type Flat Symbol MU Blast type: Work pieces can be removed easily.

Table of Contents

(mm) R A B C D E (g6) F (h9) G1 G2 J K L M N P Q1 Q2 Q3 Model 90 180 270 M5 M3 M5 M3 CRB2BW10-S CRB2BW10-SE CRB2BW15-S CRB2BW15-SE CRB2BW20-S CRB2BW20-SE CRB2BW30-S CRB2BW30-SE 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 3.4 (5.5) M3 0.004 0.012 0 0.036 4 9 29 15 8 14 3 1 5 9 0.5 24 M3 (5) M3 (10) 3.4 (6) M3 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M4 (7.5) M4 (13.5