VQ5000

S. T. Manufacturing Co., Ltd.

HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

EX510-GMJ1.eng

Master unit Remote unit Local unit (Blue) (White) (Yellow) DB DG SLD FG Terminal resister DA Terminal resister DA DA Communication connector for CC-Link DB DG SLD FG DB DG SLD FG CC-Link dedicated cable CC-Link dedicated cable Drawing 2 Connect the terminal resistor between "DA-DB" (Refer to Drawing 3). Terminating resistor Drawing 4 NOTE 1.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

RD SD EX140-SMJ1 24V 131.5 (Single, Double) 147 (3 position) 2 x M4 0V +24V 24G DA DB DG FG DIN rail clamp screw 55.9 35 5.5 (131.5) B RATE A 4 0 STATION No. 10.4 5.5 37.6 53.6 B 2 18.5 1 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

S. T. Manufacturing Co., Ltd.

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

Seal Type: Metal, Configuration: 3-Position, Exhaust Center, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: Pilot Exhaust through Footprint, Subplate: w/o Subplate, Option: External Pilot Supply

Vacuum Unit

V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 37 Vacuum Unit ZK2mA Series Dimensions: Single Unit A B G For high-noise reduction silencer exhaust For port exhaust ZK2 K m mmWA-m K to S E2, 3 Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16") E Exhaust port Ejector system,

CLQ

M E J 4-N through L G B + Stroke A + Stroke S Retraction locking LOCK V1 For retraction locking (mm) V1 30.5 35.5 40.5 Bore size (mm) 63 80 100 BP unlocking port (unlocks when pressurized) Dust cover (manual unlocking unit) Rod end male threads H1 For rod end male threads (mm) C1 26 32.5 32.5 X 28.5 35.5 35.5 H1 M18 x 1.5 M22 x 1.5 M26 x 1.5 L1 33.5 43.5 43.5 H2 11 13 16 Bore size (mm) 63

CLQ

M E J 4-N through L G B + Stroke A + Stroke S Retraction locking LOCK V1 Retraction Locking Bore size (mm) V1 30.5 35.5 40.5 63 80 100 BP Unlocking port (Unlocked when pressurized) Dust cover (Manual unlocking unit) Rod end male thread H1 Rod End Male Thread Bore size (mm) C1 X 28.5 35.5 35.5 H1 M18 x 1.5 M22 x 1.5 M26 x 1.5 L1 33.5 43.5 43.5 H2 11 13 16 63 80 100 26 32.5 32.5 Rod end nut

Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

Pulse Valve

MOperation sequence diagram M Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 s OFF for 2 s Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 s 1 s tA tA 1 s CH1 2 s 2 s 2 s 2 s OFFt 1 s 1 s 1 s 1 s CH2 2 s Two-time hitting 1 s CH3 2 s 1 s CH4 Power switch ON (Output start) Power switch OFF (Output stop) Cascade Connection (Multiple-board

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

PF-OMM0004_C

1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -66No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 210 g 260 g 410