With Factory Installed

Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

7

Hexagon socket head cap screw C (M4 x 5L) Switch mounting rod mounting tap (3 locations) Switch mounting rod mounting tap (3 locations) (Attached to auto switch) Hexagon socket head cap screw A (M2.5 x 11L) Auto switch Hexagon socket head cap screw (M3 tightening torque: 0.5 to 0.7 Nm) Auto switch mounting bracket Plugged Hexagon socket head cap screw B (M4 x 8L) Switch mounting rod E Auto

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C 54 56 ZPR10C I 56 ~PRllII ZPR10 ZPR16U 16 18 12.5 21.5 30.4 46.5 57.5 80.5 91.5 3.5 1.2 C Deep type 54 ZPR13 54 54 mml 54 'y o ' O A ~B Ij G 75 ~ 1 2 10 60 83 94 6 76 2; '" ZPR16D 16 18 15 6 5l 61 84 Z ~6 ~O 75 75 ZPR?S 76 76 76 Apphcable tube mm ZPI!~2 ZPR40 128 Q O P R .S 129 128 04 4. 20.6 15.6 10,4 130 .6 ' . 16.6 6 21.6 12.8 Applidal\le lWe 0.0 128 1 30 ZI!J!

MLGP

In order to hold the locked state, be sure to follow the steps below after confirming safety. 1) Remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to the unlocking port (2) shown below and unlock. 3) Screw the attached hexagon socket head cap bolt (3) (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), into the lock ring to hold the unlocked condition. 2.

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: No auto-switch (no magnet

Fieldbus system EtherCAT compatible SI Unit

(Only EX600-DX#C1) (2) Check if the connector is loose and if the wire is broken. Red/green all LEDs are flashing. An internal memory error occurred in the Digital input unit. Turn OFF the power for the unit and then turn it ON again. If the error is not eliminated, stop the operation and contact SMC. 2 Red ST LED is ON.

MQQ

36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 28 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 With rod end male thread: MQQDM Rod end nut H1 Bore size (mm) L1 C1

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Electric Actuators

LC7R1 Single Option Standard motor vertical mount specification electric actuator S0 Regenerative absorption unit connector and pin Series LC1 connector and pin S1 C1 Series LC1 connection cable (0.5m) Note 3) Note 3) The temperature control output cable length is 1m. Also, the connector cable already has the required contact pin and connector assembled.

MQQ

60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5 28 69 5 14 12 40 5.5 9 With rod end male thread/MQQ DM Rod end nut H1 (mm) Bore size (mm) L1 C1

Low Friction Cylinders Series MQ

H1 X 10 23.5 10.5 15.5 M5 x 0.8 16 26.5 11.5 16.5 M6 x 1.0 C1 20 28.5 13.5 18.5 M8 x 1.25 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 1180 for details regarding the rod end thread adapter and the rod end nut. 1178 Compact Low Friction Cylinder Metal Seal Series MQQ (mm) Foot type: MQQLL 10, 16, 20 Special

Compact Cylinder with Lock Series CLQ

L1 X C1 H2 Rod end nut Dimensions for cylinders with a rubber bumper are the same as the standard type above.

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds