VQ4000

Direct exhaust with silencer box: Exhaust from both sides (F/L kits only) Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust Enclosure IP65 (Except F kit) (2) (2) 01 1 station Stations Note 1) When two or more symbols are specified, indicate them alphabetically. Example) -CDK Note 2) Combination of [C ] and [S ] is not possible.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS2200-01-X12 Ex.) AS2200-01-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) X214 Ex.)

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series Model AS-F AS-F Minimizes installation time and cost Port size Applicable tubing O.D.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 267 Single Unit/Sub-plate Type 10-SV Dimensions: Series 10-SV1000 2 position single/double, 4 position dual 3 port [M12 waterproof connector type] 10-SV100(R)-W-01 Directional Control Valves Air Grippers Modular F. R.

PSxx-OML0002CN

> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4] <> [F 4] 1000 100 [F 4] [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 26[F 0] -31No.PS-OML0002CN-G [F 5] <> [F 5] [F 5] -32No.PS-OML0002CN-G OUT1 AP1 (OUT1AP1 1AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1AP2) OUT2 P_1 H_1(n_1 H_1)AP2 (OUT2AP2 1 ) OUT2 OUT2OUT1OUT2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

3 Way,3 Port Solenoid Valve NVZ Series

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

NVZseies

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series AS-F AS-F Model TMH Speed controller with Applicable tubing O.D. Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard.

Regulator for 2 MPa ARX 20

Regulator Options None Nil 1348112 G36 10 01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch fitting 5/32" One-touch fiting