CV/MVGQ

12 76.5 19.5 13 40 7 4 60 75 45 26 0 0.033 Up to 300 22 41 47.3 8 10 24 14 84.5 21 16 52 7 5 66 36 82 50 32 0 0.039 RS H A K MM N NA NN Q QY S Z ZZ I Bore size (mm) 20 25 32 40 RZQ 5 M8 x 1.25 15 24 M20 x 1.5 19.8 14 62 107 116 28 5.5 M10 x 1.25 15 30 M26 x 1.5 22 14 62 111 120 33.5 MI W S 5.5 M10 x 1.25 15 34.5 M26 x 1.5 25.8 16 64 113 122 37.5 7 M14 x 1.5 21.5 42.5 M32 x 2 29.8 16 88 143

Slide Unit Series CX2/CXWM/CXWL

port) 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) RB1411-X552 shock absorber 2 x 2 x 6.9 through 2 x 2 x 11 counterbore depth 6.5 End lock mechanism (8H7 hole pitch) 8H7 depth 6 0.015 0 2 positions for set screws for fixing shock absorbers (M5) 4 x M8 x 1.25 thread depth 15 8H7 depth 12 +0.015 0 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) (mm) F 37 38 L 41 65 P 22 45 Q 143

WRF100

limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1/ 4 Unclamp side port 306 (30.2) (30.2) 360 139 Limit switch Note 1) Rc1/ 4 Clamp side port +0.015 0 4 x 8H7( )through 820.05 143

MY1

x 1.75 thread depth 30 (to attach eyebolt) PA PA PE PE S-M12 x 1.75 depth 30 5 11 13 PB 20 Applicable nut JIS B1163 Square nut M12 Dimensions of T-slot for mounting QE + Stroke Stopper bolt adjusting unit Drive cylinder (MY1BH ) 43 NH H EY HG HL PL NW A N Z + Stroke 2-Rc 3/8 (Piping port) T-slot section for mounting A EY H HG HL L LL N NH NW PA PB PE Model 207 97.5 145 63 23 210 102 30 143

Table of Contents

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 90 270 180 90 270 180 180 270 180 270 180 90 270 Rotating angle Single vane Double vane 469 47.1 263 140 142 143 72 47.5 258 255 491 480 72 73 47 Body of rotary actuator Auto switch unit + 2 switches 30 50 60 46.5 30 Angle adjuster 30 90 150 203 47 90 100 90 100 90 90 100 90 100 100 Rotating angle 158 308

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 90 270 180 90 270 180 180 270 180 270 180 90 270 Rotating angle Single vane Double vane 469 47.1 263 140 142 143 72 47.5 258 255 491 480 72 73 47 Body of rotary actuator Auto switch unit + 2 switches 30 50 60 46.5 30 Angle adjuster 30 90 150 203 47 90 100 90 100 90 90 100 90 100 100 Rotating angle 158 308

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CV/MVGQ

0.033 RS Q G 45 75 60 4 40 7 19.5 13 22 12 76.5 Up to 300 17 32 37 6 8 26 0 0.033 50 82 36 66 5 52 7 21 16 24 14 84.5 Up to 300 22 41 47.3 8 10 32 0 0.039 RS H A ZZ Z S QY Q NN NA N MM K I Bore size (mm) 20 25 32 40 RZQ 116 107 62 14 19.8 M20 x 1.5 24 15 M8 x 1.25 5 28 120 111 62 14 22 M26 x 1.5 30 15 M10 x 1.25 5.5 33.5 MI W S 122 113 64 16 25.8 M26 x 1.5 34.5 15 M10 x 1.25 5.5 37.5 154 143

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 thread depth 4.5 W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (Piping port) (Opposite side: Same) 66 103 46 40 10 (Z) (13) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50

CXWM/CXWL

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com for fixing adjusting bolt (M6) 2-Rc 1/8 Cylinder port 8H7 +0.015 0 2-M6 x 1.0 thread depth 7 2 x 2-MB x 1.25 thread depth 15 2 x 2-8H7 depth 12 +0.015 0 4-6.9 through 4-11 counterbore depth 7 (mm) ZZ Z G SS S Q P L F Model CXWM32-25 CXWM32-50 163 123 27.5 96 27 143

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

Stations: 5 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: T (NPTF)

Stations: 4 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

Stations: 16 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF)

Stations: 14 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF)

Stations: 8 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF)

Stations: 5 Stations, Piping: 1 (P Common, R Common, A Side), Thread: F [G (PF)]

Stations: 8 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: T (NPTF)