3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point Set point Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000 3500

High Power Cylinder Series RHC

Applicable bore size (mm) M22 x 1.5 M8 x 1.25 SOR-20 NT-02 20 20 5 13 8 30 26 15 12.5 26 M24 x 1.5 M10 x 1.25 SOR-25 NT-03 25 25/32 6 17 8 36.9 32 19.6 16.5 32 M30 x 1.5 M14 x 1.5 SOR-32 NT-04 32 40 8 22 9 43.9 38 25.4 21.0 38 M33 x 2.0 M18 x 1.5 SOR-40 NT-05 40 50/63 11 27 11 47.3 41 31 26 41 M22 x 1.5 NT-08 80 13 32 37 31 M26 x 1.5 NT-10 100 16 41 47.3 39 1210 High Power Cylinder Series

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

CNG

x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

VCS

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold

With Factory Installed

AR2501-03 AR2501-03 0 I !

Clean Regulator

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

EXxx-OMY0006CN

SI SI PROFINET /PROFIsafe EX245-FPS1 M5, FE (= 1.5 Nm) (SCRJ), PROFINET Port1 (XF1) (SCRJ), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , EX245-FPS2 M5, FE (= 1.5 Nm) (RJ45), PROFINET Port1 (XF1) (RJ45), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , Fig. 7-4 (EX245-FPS1/2) 27 No.EX##-OMY0006CN M5, FE (= 1.5 Nm) M12 D code , PROFINET Port1 (XF1)

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

HRX-OM-S004

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Process Pump

E 41 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tubing size Metric size Inch size Applicable process pump Applicable process pump Applicable Applicable Reducing Reducing Class No.

AWM20 to AWM40

Safety Instructions Be sure to read Precautions for Handling Pneumatic Devices (M-03-E3A) before using.

AWM20 to AWM40

Safety Instructions Be sure to read Precautions for Handling Pneumatic Devices (M-03-E3A) before using.

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

AR20-B to AR60-B

X425 w t e 03 q w t e r For high/low temperature Option/Semi-standard: Select one each for a to g.

EX120/121/122

EX9 EA 03 Mounting specification 03 04 Direct mounting DIN rail mounting EX9-EA03 EX9-EA04 66 66 Mounting hole for 2 x M4 12.5 60 12.5 10 10 60 13.2 13.2 18 6 75 75 18 6 1678 Series EX250 Integrated Type/ For Input/Output How to Increase Input/Output Blocks, Procedure Drawing u y t q e w r EX Parts List Note No. Description Part no.