7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

M5 F Option None IN side port side OUT side port side DIN rail mounting (for manifold) With bracket With name plate D M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 F N Drop prevention Stop in the middle Note) When specifying more than one option, combine symbols in alphabetically.

Fieldbus System

Select a valve from R, U, NS or NZ when the SI Unit common is negative common. 18 Series SY3000/5000 Dimensions: Type 10/For EX600 (M12 Connector)/Series SY3000 (mm) C2 C3, N1 C4, N3 C6, N7 2 4 SS5Y3-10S6l l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Note 2) (L5) L1 ( ) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

M5 F Option None DIN rail mounted (for manifold) With bracket With name plate IN side port size OUT side port size D C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 therad M5 C3 C4 C6 One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 F N Drop prevention Stop in the middle Note)When specifying more than one symbol, indicate them alphabetically.

VFS

1, Metal joint q, w, O-ring t, y End plate (D) !2, Metal joint q, w, Gasket e End plate (D) !2, Metal joint q, w, Gasket e 02 03 VVFS3000-1A-1Plug-in type Manifold block assembly !0 Non plug-in type 02 03 VVFS3000-1A-2VVFS3000-2A-1 VVFS3000-2A-2 VVFS3000-3A-1 VVFS3000-3A-2 Plug-in type End plate (U side) assembly End plate (D side) assembly !1 Non plug-in type Plug-in type !

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) D Cylinder port size D D VQ1000 VQ2000 Special wiring specifications (except double wiring) Note 6) Regulator unit with 1 unit Note 4) Regulator unit with 2 units Note 4) Symbol C4 C6 C8 CM G1 G2 G3 J Symbol C3 C4 C6 M5 CM Port size With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

from the D side.

VFR

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

42

106 47 96.2 For U side mounting (TO) 9 71.7 For D side mounting (TD) 27 37.6 X 12 X 12 n U SIDE 4B 4A 4 B A 3B 3A 3 8 2B 2A 2 1B 1A 1 2 4 NO.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

6 PF2M705/710/725/750S -C6(-L) 87.9 2.8 depth 8.4 2.5 depth 6 8 8 PF2M725/750S-N7(-L) 95.5 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'

Title not found

Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !