3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 12 203 214 237.5 248 13 219 230 250 260.5 14 235 246 275 285.5 7 123 134 162.5 173 8 139 150 175 185.5 9 155 166 187.5 198 10 171 182 212.5 223 11 187 198 225 235.5 4 75 86 112.5 123 5 91 102 125 135.5 6 107 118 137.5

IDG

Note 2) They are not applicable in case the thread type is N or F.

Support Guide/11-LEFG Series

507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25

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P/N 3/8 B5 x 2 3/8 B5 x 3 3/8 B5 x 4 3/8 B3 x 2 #2 1/2 Barb P/N 3/8 B2 1/2 x 2 3/8 B2 1/2 x 3 3/8 B2 1/2 x 4 3/8 B2 1/2 x 5 3/8 B2 1/2 x 6 3/8 B2 1/2 x 7 #3 Barb P/N 3/8 B3 x 2 3/8 B3 x 3 3/8 B3 x 4 3/8 B3 x 5 3/8 B3 x 6 #4 Barb P/N 3/8 B4 x 2 3/8 B4 x 3 3/8 B4 x 4 3/8 B4 x 5 Thread Size 1 Barb # (Size) Quantity of Barbs Part Numbering Example 52 Available with #1, #2, #2

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 43 54 75 85.5 59 70 100 110.5 75 86 112.5 123 91 102 125 135.5 107 118 137.5 148 123 134 162.5 173 139 150 175 185.5 155 166 187.5 198 171 182 212.5 223 187 198 225 235.5 203 214 237.5 248 219 230 250 260.5 235 246 275 285.5 251 262 287.5 298 267 278 300 310.5 283 294 325 335.5 299 310 337.5 348

VCC

VCC VCC TQ L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 651 VCC Series Dimensions SUS316L

Vacuum Equipment

1 kg (Lifting force: 9.8 N) : Conditions/Number of pads: 5 pcs.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

VT307

1/8, 1/4 (A port) P = 26 L Dimension n: Stations Stations Formula L1 = 26 x n + 24 L2 = 26 x n + 12 2 76 64 3 102 90 4 128 116 5 154 142 6 180 168 7 206 194 8 232 220 9 258 246 10 284 272 L L1 L2 [ ]: With light/surge voltage suppressor 4-7-8

VQ7-6/7-8

10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202 3/4 L2 666 610 554 498 442 386 330 274 162 218 ( ): 3/4 Dimensions inside are for rubber seals. 3-10-28 29 ISO Standard Solenoid Valve: Size

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

OMU0023

Function Description 1 N C Not connected 1 2 N C Not connected 3 SD + Connect + signal lead 1) 4 SD Connect signal lead 1) 5 N C Not connected 6 N C Not connected 8 CN3 7 N C Not connected 8 N C Not connected Note 1) Refer to the operation manual for the controller module to be connected before wiring. If the functions are indicated as A / B, connect the signals as + / -.

VXZ

Normally closed N. O.

CHKD/CHKG

CH2 Mounting bracket type CHA Symbol Port position Note) Type Basic type B Number of auto switches Related Products Top Nil S n 2 pcs. 1 pc. n pcs. DL Foot bracket Without auto switch Nil Auto switch type Foot type Right LB Select applicable auto switch models from the table below.

Lightweight and Compact

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 74 C O N T E N T S HRS090 Series Standard Type HRS HRS

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

"n" pcs. Slide bearing guide Cam follower guide Nil S n M C Stroke Nil Without auto switch Refer to the standard stroke table on page 2. Refer to the table below for auto switch types.

VVXA21/22

(Example) 7 stations of VXA31, Individual port Rc Blanking plate Common port 1 8 Plug Individual port (Base P/N) VXA311-07 1 pc (Valve P/N) VXA3115-00 6 pcs (Blanking plate P/N) VX011-0041 pc The standard arrangement of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side.