o

9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

o

9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

SMC Pneumatic Clean Series

x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2 10-/1121-/22Cylinder with end lock/ 20, 25, 32, 40 (Head side lock) How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

2 Phase Stepper Motor/Without Motor Brake Series LXS

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

SMC Pneumatic Clean Series

11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6

ITV

Right angle type cable connector 3 m 52 10 (33) Straight type cable connector 3 m 52 12.5 Setting part 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 111 11 Digital pressure display M5 x 0.8 Solenoid valve EXH Breathing M4 x 0.7 depth 8 F.G.

Fieldbus System

, 3/5(E) port] Applicable tube O.D.: 10, 3/8" 8 DIN rail 5.5 PE B A B A B A B A B A A 4 3/5 A 4 A 4 A 4 A 4 35 (114.8) 97.5 113.4 116.7 39.5 26.5 E X 101 1 81.2 61.7 Cm: 14.5 01: 16.2 P 47.3 5.5 B 2 B 2 B 2 B 2 B 2 4 x M5 mounting hole 1.4 10.9 2.7 4.7 1/8 [4(A), 2(B) port] SI unit L2 34.2 1.5 One-touch fitting [4(A), 2(B) port] L4 (DIN rail mounting hole pitch: 12.5) 5.3 Applicable tube

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5 Across AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model M MA W H S Z J V K L MXP16-20B 40 30 65 58 20 102 93 82

CJ5-S

AL A MM Width across flats NA K REC C0.1 8-J 4-FD M S + Stroke ZZ + Stroke H FX0.15 B CX CY Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 MQQ M Up to 200 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 124 25 Up to 300 22 19.5 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 129 32 RHC Up

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 5H7 depth 6 +0.012 0 2 x M8 x 1.0 Adjusting bolt 2 x RB0805-X552 Shock absorber 2 x M5 x 0.8 Cylinder port 4 x 4.3 through 4 x 8 counterbore depth 4.5 2 x M5 x 0.8 Hexagon socket head cap plug (Cylinder port) Max. 6 2 x M5 x 0.8 plug (M-5P) (Cylinder port) Max. 6 End lock mechanism 5H7 depth 6 +0.012 0 2 x 2 x 4.3 through 2 x 2 x 8 counterbore depth 4.5 (mm) ZZ Model CXWM16-50R