25

x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

-fl Seies

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

NARM Series

n) + 23 Common IN 1 8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

HRX-OM-R016

Rated Rated Sensitivity supply voltage x size voltage current of leak [V] [A] current [mA] 3 cores x 10 30 HRS030--20 1-phase 14AWG (3 cores x 2.0mm2) 200, 200-230V AC 230 HRS030--20-T (50/60Hz) 15 30 (including (High pump head [Optional]) ground) HRS Series 3.3 Installation 3-9 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.3.3 Preparation and wiring of power supply cable The electrical

ZSE30/ISE30

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

Series 10-, 21- AW-B Filter Regulator

1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1082 A

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Packing NBR O.D.112 X I.D.90 X T3 O.D.112 X I.D.90 X T3 3 pcs. O.D.112 X I.D.90 X T3 5 pcs. t Gasket V#6500 O.D.268 X I.D.225 X T3 O.D.218 X I.D.175 X T3 y AL-62S AL-63S AL-31S NBR JIS B2401G35 1 pc. JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs. JIS B2401G35 5 pcs. u O ring 4.6-10 Series AMD Dimensions: AMD150 to AMD650 Accessories D: With auto drain (N.O.)

ZSE30/ISE30

Y, Z directions for 2 hours each 100m/s2 in X, Y, Z directions 3 times each 01 type: R 1/8, M5 x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated) Sensor pressure: Silicon; O-ring: NBR Material Weight 43g (without lead wire) Note 1) When switch output is selected, analog output is not available.

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

ZX

0.8 OXY: M6 x 1.0 Vacuum supply port 2-3.3 mounting hole Vacuum pad connecting port OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 13-2-16 16 Vacuum Module: Ejector System Series ZX Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1S B Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Air 20 kPa to

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Metric 10.5 12 14 17.5 Metric M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 12 16 20 25 Basic (All dimensions are common except "A" and "B".)

TABLE OF CONTENTS

Holes #10-32 UNF THD x .25 (6.4) DEEP .

7.4

7.5 39.5 M3 x 0.5 External pilot port (External pilot type) 5.2 2 x M5 x 0.8 5(R1) port 7.5 Manual override 2 x M5 x 0.8 1(P) port 68.5 (Double solenoid dual 3-port) 68.5 (Double solenoid dual 3-port) 48.2 (Single solenoid) 48.2 (Single solenoid) 4.1 5 (With barb fittings) 34 2 x 4.5 Mounting hole 76.5 (Closed center) 76.5 (Closed center) R1 5 R2 3 X (31) 16.3 28.7 P 1 6.8 P 1 22.8 17.2

CJ2X/CUX/CQSX/CQ2X/CM2X

1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 M10 x 1.25 M10 x 1.25 JIS Class 2 CV +1.4 0 mm Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

x 1.25 M14 x 1.5 M10 x 1.5 M18 x 1.5 16 M8 x 1.25 M14 x 1.5 20 M10 x 1.5 M18 x 1.5 +1.0 0 mm Female thread Male thread M5 x 0.8 M5 x 0.8 Rod end thread JIS Class 2 Rod end thread tolerance Stroke tolerance Port size Vacuum port, Relief port Bore size (mm) 11(Vacuum type) +1.0 0 mm 12 16 20 25 M5 x 0.8, RC 1/8 Note) M5 x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure