1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

Compact

00 I 1.8, Eccentrlc distance: L(mml | , ^-l^-t I I fti-+i-*-t'-1 | l t ' + t r Over 100 stroke Non-rotating accuracy of plate Non-rotatng accurary 0 10.09. $0Pi8$ I)(P _ uomlam neouil nctun loxt Fifl.[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?

SMC Pneumatic Clean Series

MM LX 2-LC D I LZ 4-LD 20, 25 Width across flats B2 Width across flats NA Standard port LT 45 N N Relief port Y X Y S + Stroke X Z LS + Stroke ZZ + Stroke 32, 40 (mm) 54 47 47 40 B LH LT LS LX LD 8 13 AL F K MM NA NN B1 B2 Bore size H H2 H1 S P N I G D A ZZ 6.8 4 LC LZ X Y Z 8 8 8 42.5 34.5 30 24 1/8 46.5 37.5 33.5 28 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 88 64 62 62 40 32 25 20 24 22

NCA1

Note 2) Refer to p.5.3-5 for lead wire length.

LX Series Compact Electric Actuators

00 I 1.8, Eccentrlc distance: L(mml | , ^-l^-t I I fti-+i-*-t'-1 | l t ' + t r Over 100 stroke Non-rotating accuracy of plate Non-rotatng accurary 0 10.09. $0Pi8$ I)(P _ uomlam neouil nctun loxt Fifl.[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Cylinder with Lock Series CLS

Symbol H A L1 H1 Y type double knuckle I type single knuckle Bore size (mm) 125 140 160 Y-12 I-12 110 50 100 156.5 Y-14 I-14 110 50 105 161.5 Y-16 I-16 120 56 110 170.5 L1 H1 A, H dimensions when single/double knuckle joint and rod end nut are mounted together A H Bore size (mm) 125 140 160 65 125 65 125 76 140 Single knuckle joint and double knuckle joint should be used separately.

Air Cylinder CP Series Cylinder Positioner Assembly

63mm cAt N63-P 80mm cA1N80-P!

CY1F

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

Sine Rodless Cylinder Series REBR Direct Mount Type

0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Series KP/KPQ/KPG

P Polyolefin P White, Black Red, Blue Yellow, Green 20 P P 100 TPS P P P Soft Polyolefin P P 1ft = 0.3048 1in = 25.4mm 3 Series KP Clean One-Touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.

Series KP/KPQ/KPG

P Polyolefin P White, Black Red, Blue Yellow, Green 20 P P 100 TPS P P P Soft Polyolefin P P 1ft = 0.3048 1in = 25.4mm 3 Series KP Clean One-Touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

HRX-OM-X071

Model number Serial number Type and quantity of refrigerant How to read the serial number y T 001 Jun 2020 y T 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y Repeated from A to Z in alphabetical order 2021 Z 5 S 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label 1-3

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

E N T S 2-Color Display Digital Flow Switch PF2M7(-L) Series How to Order. p. 9 Specifications. p. 11 Set Point Range and Rated Flow Range. . p. 13 Flow/Analog Output. p. 13 Pressure Loss (Reference Data): Without Flow Adjustment Valve. p. 14 Flow Rate Characteristics (Reference Data). p. 14 Flow Rate Characteristics at Negative Pressure (Reference Data). . p. 15 Internal Circuits and Wiring

Compact Vacuum Ejector Series ZQ

Install the ejector body gasket for manifold t into the gasket groove of each ejector assembly r. Install the exhaust block gasket y around the projected part. 2. Install the exhaust block gasket y around the projected part of the end block R w. 3. Install the ejector body gasket for manifold t into the gasket groove of the end block L e. 4.