Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual:

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount

Fieldbus System

EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.

High Purity Chemical Valve

Port size 1/4 Symbol 02 Construction q e w Description Material Parts list R P No. 1 Actuator section PPS 2 Body PFA r 3 Diaphragm PTFE 4 End plate Stainless steel 479 Series LVA Dimensions P R 30 41 26 A M5 x 0.8 Pilot port (3 x NPT1/4) 3 x Rc1/4 Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2 x M5 x 0.8 Depth 6 20 480 Manually Operated Integral Fitting Type/Threaded Type Series

0.4

T NPTF F G In the case of alone Sub-plate Port size Terminal block 1/4 02 02 PW VQ2000 Dimensions 4 89.4 Sub-plate Single Unit (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw Manifold Optional Parts M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 Safety Instructions Specific Product

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Air Fittings & Tubing

M D1 D2 L1 Urethane KQ2LF04-M5 KQ2LF04-M6 KQ2LF04-01 KQ2LF04-02 KQ2LF06-M5 KQ2LF06-M6 KQ2LF06-01 KQ2LF06-02 KQ2LF06-03 KQ2LF08-01 KQ2LF08-02 KQ2LF08-03 KQ2LF10-02 KQ2LF10-03 KQ2LF10-04 KQ2LF12-02 KQ2LF12-03 KQ2LF12-04 M5 X 0.8 M6 X 1.0 14.5 8 8 5 3.5 3.5 15.5 21 24.5 15 16 22 25.5 26 4 10.4 16 18.5 1 8 1 4 14 17 13 20 5 6 13 10 4.2 4.2 M5 X 0.8 M6 X 1.0 3.5 3.5 8 8 6 17 1 8 12.8

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA412-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.14 2.0 N.C. Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

Pressure Gauge Guide

MPa G46-2-01 to 02-SRA 0 to 0.2 44.5(46.5) 5 44.5(46.5) G46-2-01 to 02-SRB G46-4-01 to 02-SRA 0 to 0.4 G46-4-01 to 02-SRB M5 x 0.8 x 5 M5 x 0.8 x 5 8 1 R MPa 4 1 R G46-7-02-SRA 0 to 0.7 G46-7-02-SRB M48 x 2 M48 x 2 G46-10-02-SRA 0 to 1.0 G46-10-02-SRB Note) Do not apply pressure more than the maximum display pressure. This will cause a malfunction.

VFA3000

3 x , 18 14 VZA (P , A, B port) VFA VFRA 2 x 4.3 VA (Mounting hole for manifold) 2 x 4.2 (Mounting hole) 2 x 18 (Pilot port) 2 x M5 x 0.8 (Breathing port) 2 x 18 (R1, R2 port) 1765 Series VFA3000 Dimensions: Base Mounted 2 position single: VFA3140-02 03 2 position double: VFA3240-02 03 2 x 4.3 2 x 4.3 (Mounting hole) (Mounting hole) 2 x 18 (Pilot port) (Pilot port) Max. 3 Max. 3 3 (Breathing

ZP

(mm) Pad type Material Series ZPT Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter (mm) 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) Connection ZX Symbol 2004 2 x 4 Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 ZR 4010 4 x 10 02 04 2 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 M5 x 0.8 M6 x 1 M8 x 1 Male thread Female

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

Speed Controller: Standard Type Series AS In-line Type

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Secondary Batteries

2, Mounting bolt x 8 Flange x 1, Mounting bolt x 4 Trunnion pin x 2, Trunnion bolt x 2, Flat washer x 2 Clevis x 1, Mounting bolt x 4, Clevis pin x 1, Retaining ring x 2 Pivot bracket x 1 13 Air Cylinder: Standard Type Double Acting, Single Rod 40, 50, 63, 80, 100 CDA2 Series 9091How to Order CDA2 L 50 100 M9BWL 90 With auto switch Series compatible with secondary batteries Number of auto

0.

port] 23.5 11.5 02 03 Grommet (G): VQZ3l5l-lGl19 2 x 4.5 (For mounting) 5 37 Manual override 5 A 2 45 P 1 R 3 54.1 76.3 Approx. 300 (Lead wire length) + 54.5 57 41.6 PE port 11.5 26.5 20.5 X 12 M5 x 0.8 (External pilot port) 1/4, 3/8 [1(P), 3(R) port] 13 (14) 21 (19) 47 ( ): VQZ315-lGl1-01 L-type plug connector (L): VQZ3l5l-lLl1DIN terminal (Y): VQZ3l5l-lYll102 03 02