Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

protocol/Input/Output) Mounting Symbol Type Applicable interface Nil Without accessory S Straight type communication plug connector DeviceNet CC-Link Ver. 1.10 T T-branch type communication plug connector 1 I/O cable (1.5 m) Parallel input (NPN) Parallel input (PNP) 3 I/O cable (3 m) 5 I/O cable (5 m) 7 Screw mounting 8*3 DIN rail E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link

CG1-OM0227

P.12631371 Best Pneumatics No. P.13281329 (NC=b )(D-F9G,F9H )Best Pneumatics No. P.1290 (D-G5NB )Best Pneumatics No. P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3.

VHS20/30/40/50

SUP SUP IN OUT Applicable air preparation equipment Spacer with bracket P/N Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 Interface P/N AC20 AC25, AC30 AC40 AC40-06 AC50, AC60 Note) Y200 Y300 Y400 Y500 Y600 Y200T Y300T Y400T Y500T Y600T Spacer with bracket Note) Although connection to AC60 is possible, the flow rate may decrease due to the mounting position. 5-8-20 3 Series

3 Port Solenoid Valve

NPP-02-5 3 Port Solenoid Valve 3 Port Solenoid Valve Power Consumption (with power saving circuit) Temperature rise: 1C (with power saving circuit) V100 Specifications V100 Specifications V100 Specifications V100 Specifications Type With power saving circuit Standard Valves of specific power consumption can be manufactured to suit the f f f p f p p Power Consumption 0.1W 0.35W Temperature

Ionizer IZN10 Series

Intermittent control timer (P.460) 449

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

G SMC H F P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH.

BP1000

01 02 10 20 30 Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

25

Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume

ML2B

11 SO-010-24 MYB32-15AA5901 GMY32 RCS-10 NLP-32A MYB25-15AA5900 GMY25 RCS-8 NLP-25-19A RE A B 8.3 x 4.5 x 1.9 P-6 SO-016-9 P-9 SO-010-21 7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please

PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

Clean Air Module

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

ML2B

11 SO-010-24 MYB32-15AA5901 GMY32 RCS-10 NLP-32A MYB25-15AA5900 GMY25 RCS-8 NLP-25-19A RE A B 8.3 x 4.5 x 1.9 P-6 SO-016-9 P-9 SO-010-21 7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please

ML2B

11 SO-010-24 MYB32-15AA5901 GMY32 RCS-10 NLP-32A MYB25-15AA5900 GMY25 RCS-8 NLP-25-19A RE A B 8.3 x 4.5 x 1.9 P-6 SO-016-9 P-9 SO-010-21 7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

PSxx-OMU0002CN

2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

F B With pressure at head side With pressure at rod side *Refer to p.5.3-2 for further information on the auto switch.

PSE530/200

Auto shift function (P. 16-3-17) Allows stable switch output even when supply pressure changes.

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

ZSE30A(F)/ISE30A

Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time Switch output operation in normal conditions ON OFF Time Switch output operation when anti-chattering function is on. ON OFF Time J Power-saving mode (F7) Power-saving mode can be selected. It shifts to the power-saving mode without button operation for 30 seconds.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120