10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

The SQ plug lead units are available with D-sub connector, flat ribbon cable connector or PC wiring system compatible flat ribbon cable kits.Fluid: Air/inert gas , Maximum operating pressure: 0.7MPa , Effective area mm² (Cv factor):0.40 to 0.71, Coil rated voltage: 12, 24VDC , Power consumption (current): 24VDC; 0.4W DC (17mA), 12VDC; 0.4W DC (34mA) , Ambient & fluid temperature: -10 to 50

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%6046Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)275UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, UL, SS5Y3 BUILT IN FITTING

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: P (Flat Ribon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C10 (ø10 One-touch Fitting)

Model: 10 (Side Ported), Connector Type: P (Flat Ribon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wire: L1 (34 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 10 Stations, P,E Port Entry: D (D Side, 2 to 10 Stations), SUP/EXH Block Assembly: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch), Mounting: BA (Direct Mounting, Name Plate, w/o Station Number)

Model: 10 (Side Ported), Number of Cores - Lead Wire: L1 (34 Cores), Lead Wire Length: 3 (3m), Valve Stations: 10 Stations, P,E Port Entry: D (D Side, 2 to 10 Stations), SUP/EXH Block Assembly: Internal Pilot, A,B Port Size: C10 (ø10 One-touch Fitting, Straight, Metric)

AMX-OM-Q015E

Standard dew point -20oC, -15oC : about 10 min.

VEX-OMV0001

No.2 (-) (VEX150117011901 ) DIN DIN No. 1 2 DIN + 68 (VEX150117011901 ) AC100V AC200V DC (+ (-) 9 VEX-OMV0001 (12) (1) () (2) (3) (4) () (5) 3(R) (6) (4) (7) (8) (9) (10) (11) (22) (12) (13) (14) (15) 10 VEX-OMV0001 P2 (22) (16) (12) (22) (17) () (18) (19) 3(R) (3) (6) (4) (20) 2(A) (22) (21) 11 VEX-OMV0001 No

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Specifications, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 10

Specifications, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 10