Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

P 2-Counterbore dia.

Clean Exhaust Filter

Note 6) Due to the softness of polyurethane tubing, it may fold when being inserted.

CRB1/Size: 10, 15, 20, 30

(For ClRB1FWl10) Ass'y Part Number: P211090-2 (For CmRB1FWm15) MRQ MSQ MSUB Ass'y Part Number: P211060-2 (For ClRB1FWl20) Ass'y Part Numer: P211080-2 (For ClRB1FWl30) 1.1-6 Series CRB1 Effective Output Direct Mounting of Body L dimensions of the body are shown below.

VXA31/32

Note 1) The leakage amount (10 6 Pam 3/s) is value when differential pressure is 0.1 MPa. Note 1) Grease for vacuum has been applied to the sliding part, silicon grease to the other options. Note 2) Manifold base material: Aluminum 17-3-14 The VX series will be revised shortly. Series VXA31/32 Common (C.O.)

MHL2

MHL2-40D MHL2-40D1 MHL2-40D2 SMHL2C, #4 SMHL2C, #5 SMHL2C, #6 (#6+#7) 2.2-12

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

High Vacuum L Type Valve

Description XLS-16XLS-16-P XLS-25XLS-25-P (2) Coil assembly XLS16-20-*G,C,D,T XLS16-20-P*G XLS25-20-*G,C,D,T XLS25-20-P*G (6) Core assembly XLS16-30-1 XLS25-30-1 (4) Armature assembly XLS16-30-2 XLS25-30-2 (3-1) Core O-ring AS568-018V AS568-018V (3-2) Bonnet O-ring AS568-025V AS568-030V Note) Enter voltage no. at * G, C, D, and T after * mean the symbol showing an electrical entry. 6 XL

3 Port Air Operated Valve

Leakage Spool has not completely shifted (2) Poor seal on actuator (cylinders, etc.) side (5) Intrusion of foreign matter (2) Wear of packings of the spool valve (6) Leakage from the gasket (manifold) (7) Inferior tightening of installation screw No.

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

SI unit for AS-Interface

N_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 (mm) Wiring (for power supply, communication, input and output) and piping are carried out on one side only.

Large Flow Lubricator AL800/900 Series

assembly Bumper retainer seal -2, -8 -2, -8 Standard -2 -3 -6 -8 -1 -1S-1 -1S-2 NBR C4SL C4SL-2 C4SL-3 C4SL-6 C4LL-8 800147AP 800147A-S1P 800147A-S2P O-ring 15 1 NBR C4SFP-260S C4SFP-260S Case assembly Note 2) 14 1 Note 1) Description: Bumper assembly Note 2) O-ring !

Precision Regulator

IR30-OM04-F PRODUCT NAME Precision Regulator MODEL/ Series IR3120 Contents Safety Instructions 2~3 1. Specifications 4~5 2. Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8.

EX600-SDNA_eng

ON ON ON 1 2 3 4 ON Settings2 Settings2 Settings1 Settings2 1 1 OFF OFF 4 3 2 1 ON ON 9 6 6 0 0 4 3 : : BUS IN BUS OUT 1 2 3 4 5 6 7 8 Setting2 OFF OFF OFF OFF 5 ON ON ON 2 2 ON Address and Data Rate are set via the PLC. (Software) * Address and Data Rate are set by the SI unit switch.

XMH/XYH Series

A E Table 6 Unit:mm Model n J XYH-25 100.2 75.8 48 1 23.5 40 26 41 21.5 XYH-40 130 102.5 66 2 38 55 41 57 30 XYH-50 178 119 79 2 53 75 52 70 35 8 XM-OMP0005-A 6.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

AC PB0111-3 (PB0111) DC Manual override (With lock) PB0111-1 Manual override (Non-locking) PB0101 PB0101-1 Note) There is polarity of (1) +, (2) . ( ): With indicator light 4-16-2 Series VS3115/3110 Dimensions Body ported VS3115-G VS3115-D 2-6 mounting hole 2-6 mounting hole V100 SY SYJ G 1/2 (Cable 8 to 10) Manual override Manual override VK VZ 89.5 (114) [92.5] 1 8, 1 4 [92.5] 3-Rc 3-Rc

MGP-OM0242Q

MGP*-OM0242Q PRODUCT NAME MODEL / Series / Product Number 1213Series MGPL-Z Contents Safety Instructions 2 Product feature 4 1. How to Order 5 2. Model 5 3. Specifications 5 4. Standard strokes 6 5. Intermediate stroke 6 6. Precoutions on Selection 7 7. Precautions on Design 7 8. Mounting Methods 8 9. Piping 11 10. Operating Environment 12 11. Speed Control 12 12.

Large Flow Air Filter AF800/900 Series

Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.