Electric Slide Table / High Precision Type 《 AC servo motor 》

200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw Ball screwBelt(parallel)

IZx-OMX0087

400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50

AC Servo Motor Driver (Pulse input type/Positioning type)

The highest value in the past 15 seconds is displayed relative to the rated torque of 100%. 0 to 400 % 9 Instantaneous torque Torque that occurred instantaneously is displayed. The value of the torque that occurred is displayed in real time relative to the rated torque of 100%. 0 to 400 % 10 Within one-revolution position Position within one revolution is displayed in encoder pulses.

LEF-OM007xx

S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke

LEY-OM007

30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.17 1.24 1.41 1.67 1.85 2.02 2.20

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

AC Servo Motor Driver (CC-Link Type)

The highest value in the past 15 seconds is displayed relative to the rated torque of 100%. 0 to 400 % 14 Instantaneous torque Torque that occurred instantaneously is displayed. The value of the torque that occurred is displayed in real time relative to the rated torque of 100%. 0 to 400 % 15 Within one-revolution position Position within one-revolution is displayed in encoder pulses.

OMU0023

(LAT3-10: 5.0, LAT3-20: 4.8, LAT3-30: 3.9, LAT3-50: 2.0) Note 4: If the target position exceeds the stroke range, the Card Motor operation speed is set to above 400 mm/s or any other impossible value is set, Step Data error will be generated from the Card Motor controller during the Step Data operation.

C95Series

" SO, "63 a.5 25, 50, 75, 100,125, 150, 175, 200, 250.300, 350. 400. 450, 500 40 " !

Power Clamp Cylinder

North America For Europe For France Special Maximum clamping force (lbf) Maximum clamping force (N) 8000 2000 7000 6000 1500 80 80 5000 4000 1000 63 63 3000 40 50 2000 500 50 1000 40 0 0 5 10 15 20 0 450 400 350 300 250 200 150 100 50 0 Arm length L (mm) Arm length L (in) Allowable load for clamp arm end Refer to the graph on pages 190 and 191 for parts weight of the arm.

PFxx-OMA1007

Key lock relese, DS unlock Key lock relese, DS lock Key lock, DS unlock Key lock, DS lock Key lock relese, DS unlock Common Device access locks Operation pressure Sets the pressure in the operation mode. 0 to 1050 kPa 400 kPa Common Sets the pressure in the standby mode.

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

JXCx-OMU0026

JXC-OMU0026 Supplement 1.3 Initial setting of LES(H) series Model LES(H)8 LES(H)16 LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16 8 Max. speed [mm/s] 400 200 400 200 400 200 Min. speed [mm/s] (Independent and interpolation) 20 10 20 10 20 10 Min. speed [mm/s] (Speed tuning control) 25 13 27 14 30 15 Supplement 1.4 Initial setting of LEP series Model LEP8 LEP16 Lead symbol J K J K

JXCx-OMT0001CN

-107No.JXC-OMT0001CN-C 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 mm/s 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] () 15 8 4 18 9 5 24 12 6 24 12 6 [mm/s] () 22 12 6 26 13 7 34 17 9 34 17 9 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20

JXCx-OMT0002

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke (mm) 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and interpolation) 15 8 4 18

SFOD-OMT0010

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke [mm] 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and 15 8 4 18 9 5 24 12 6 24

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Applicable stroke table Stroke [mm] Size 200 300 400 500 600 800 1000 1200 1500 Manufacturable stroke range [mm] 100 200 to 1500 *Please consult with SMC for non-standard strokes as they are produced as special orders. -4- 1.1.2 Specification Model LEJS100T9H LEJS100T9A LEJS100T9B Stroke [mm] *1 200300400500600800100012001500 3000(mm/s2) 60 150 400 5000(mm/s2) 43 93 150 Horizontal 9800(mm

Electric Actuator / Guide rod Slider

mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or less 500mm stroke or less 150 150 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 500 500 600mm Wall Mounting 500mm or less Overhang direction:L5[mm] 400 400 Overhang direction:L5[mm] 300 m 300 600mm stroke or less L5 200 200 100 100 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250

SL5200

Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Code 0 M V X Specification Standard Sub-atmospheric Code V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7

ChemicalThermo-con

, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) HED003 HED005 60 80 100 120 140 F 40 60 80 100 120 140 F 40 1600 800 Facility water: 95F (35C) Heating capacity (W) Heating capacity (W) 1200 Facility water: 95F (35C) Facility water: 77F (25C) Facility water: 77F (25C) 600 800 400 400 200 Facility water: 50F (10C) Facility water: 50F (10C) 0 0 0