A_HEC-OM-K001

.: 25oC 1) Cooling capacity 800 Facility water 10oC Facility water 25oC 600 Cooling capacity W Facility water 35oC 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 9-7 Cooling capacity (HED003) 2) Heating capacity 1000 800 Heating capacity W Facility water 35oC 600 400 Facility water 10oC 200 Facility water 25oC 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Motor Output Slide Screw Slider Guide 50W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Cable length Power supply voltage Cable entry direction Left entry 2 3 4 5 2m 3m 4m 5m 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right Left Top Bottom Axial entry Right entry Bottom entry Specifications 100 5.4 200 6.1 300 6.9 400

VH Series, 4 Way Hand Valve

/ When lubricated, use turbine oil #1(ISO VG32) VH600 Optional specifications VH300 Bottom porting VH410 VH300, 400 Panel mount VH200, 300, 400 VH210 Different P port location* All models 1(P) port is located on handle side.

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LEFS16A-400 q Check that actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Step Motor Controller

LEFS16A-400 q Check that actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Multi-channel Digital Sensor Monitor ( compatible)

. -76No.PS-OMW0012-C Unit specification and measurement value (PD) Range Unit Rated pressure range Display / settable range A to B C to D kPa 0 to 2.000 -0.200 to 2.100 Pa 0 to 2000 -200 to 2100 Mbar 0 to 20.00 -2.00 to 21.00 2 kPa Psi 0 to 0.2901 -0.029 to 0.305 (0.002) mmH2O 0 to 203.94 -20.4 to 214.1 Pressure gauge measurement value (PD) 0 to 4000 -400 to 4200 MPa 0 to -0.101 0.010 to

XL-OMY0002

800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11

IP8001 Series

Parameter Functioning in Manual Mode For the position indication (P value), zero / span setting (parameter code: 400) functions as it is. Reflection of Changed Content in Parameter Mode The changed content is reflected at the time when the mode moves from parameter to manual, and then moves to auto mode*1.

Actuator Position Sensor

3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002 BDC4 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16386) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4003 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC4 (16387) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 1: "R" means Read and "W" means Write. 2: Y: Included in DS (data storage), N: Not included in DS. 3: Refer to initial value

IZ-OMK0015

to 500 3 300 to 2000 300 to 400 5 300 to 2000 300 to 400 10 200 to 2000 200 to 300 15 200 to 2000 200 to 300 20 150 to 2000 150 to 250 30 50 to 2000 50 to 200 60 50 to 2000 50 to 150 (Note) After installation, verify the effects of static neutralization.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

seal X42 Anti-corrosive guide unit X45 EPDM seal Mass (g) Stroke (mm) Stroke (mm) One side centralized piping, with switch rail One side centralized piping, without switch rail Model 250 300 350 400 200 380 620 1240 150 330 550 1130 100 280 480 1020 250 300 350 400 50 230 410 910 200 450 690 1320 150 390 600 1190 100 330 510 1060 50 270 420 930 MXY6 MXY8 MXY12 690 1350 760 1460 780 1450

AC Servo Motor Driver (CC-Link Type)

The highest value in the past 15 seconds is displayed relative to the rated torque of 100%. 0 to 400 % 14 Instantaneous torque Torque that occurred instantaneously is displayed. The value of the torque that occurred is displayed in real time relative to the rated torque of 100%. 0 to 400 % 15 Within one-revolution position Position within one-revolution is displayed in encoder pulses.

e-Rodless Actuator

Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

Single Axis Electric Actuator Series LJ1

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Electric Actuators

104 110 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 106 112 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 104 110 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 106 112 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 108 114 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300 400 500 600

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

C 1 LE N 1 P Controller Actuator part number Option (Except cable specifications and actuator options) Example: Enter LEFS16A-400 for the LEFS16A-400B-R11N1.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

48 20 41 39 17 24 31 25 Up to 1800 295 Lube Non-lube 277 225 226 182 115 280 150 335 18.5 M20 x 1.5 111 M45 x 1.5 135 90 45 153 3/4 1 63 60 50 74 48 20 46 39 17 31 24 25 Up to 1800 352 336 275 277 225 140 355 180 420 23 M24 x 1.5 141 M56 x 2 160 105 55 176 71 60 86 25 49 67 60 20 56 35 29 30 Up to 2000 0.17 x Stroke Long Stroke With Auto Switch: 125 to 200 Only 384 369 55 330 330 270 140 400

HRX-OM-Z002

(Note3) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid rated flow, (4)Power supply : 400 VAC. (Note4) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid temp. : CH1 : 20/CH2 : 25, (4)Circulating fluid rated flow, (5)Power supply : 400 VAC, (6)Piping length : Shortest, (7)Rated cooling load is applied.