Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: Rod Ø10 KM10

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: Rod Ø8 KM8

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: 1/4

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: Rod Ø12 KM12

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: 3/8

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: 1/2

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: Rod Ø10 KM10

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: 1/4

Size: Standard+Compact+High Noise Reduction, Noise Reduction: 00 [Standard (30dB)], Port Size: 3/8

Size: Standard, Noise Reduction: 00 [Standard (30dB)], Port Size: 1

Size: Standard, Noise Reduction: 00 [Standard (30dB)], Port Size: 1 1/4

Size: Standard, Noise Reduction: 00 [Standard (30dB)], Port Size: 1 1/2

Size: Standard, Noise Reduction: 00 [Standard (30dB)], Port Size: 2

Size: Standard, Noise Reduction: 00 [Standard (30dB)], Port Size: 3/4

Construction: 00

Construction: 00

Multistage Ejector

(page 16)1 Vacuum pressure sensor: Digital vacuum pressure switch Digital vacuum pressure switch ZL-ZSE30A-00-Refer to how to order the digital vacuum pressure switch.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Table Displacement (Reference Value) 0.06 W L Displacement [mm] 0.04 LEFB40 (L = 37 mm) LEFB32 (L = 30 mm) 0.02 LEFB25 (L = 25 mm) 00 100 50 150 250 200 300 Load W [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Note 2) Check the clearance and play of the guide separately.

Integrated Controller

12 10 8 6 4 2 0 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 50 100 150 200 250 Speed: V [mm/s] 10 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) EQFS25HH/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 2.5 16 14 12 10 8 6 4 2 00

Fax Form

Fax Form Available to receive faxes: Monday Friday 8:00-4:30 PST Fax this form to: 1-714-921-9955 (Items marked with * must be filled in.) *Did you complete the survey?