Calibration Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

, Calibration Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

None, Calibration Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

, Calibration Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

, Calibration Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

, Calibration Certificate: None, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

LEJ-OM002xx

(Resolution:262144 p/rev) Power consumption[W] Note6) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating[W] Note7) Horizontal 2 2 Vertical 10 12 Max. instantaneous power consumption[W] Note8) 445 725 specification Type Note9) No excitation operating type Lock Holding force [N] 67 101 203 220 330 660 Power consumption [W] at 20Note10) 6.3 7.9 Rated voltage [VDC] 24

VM

.=2.5mm only, w/threads Plunger Spring Valve rod Body u i w e Stainless steel Lever Valve NBR o NBR Packing r Polyacetal Retainer t Stainless steel Spring !

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

PFxx-OMU0002

3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L Instantaneous flow 2 L/min 5 L/min 10 L/min Flow Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)

Compact Cylinder Series NCQ8

L M9NL 197in (5 m) .

Water-cooledThermo-chiller

min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min) Facility water required flow rate Temperature stability Note 3) 0.54F (0.3C) Pump capacity Note 4) (50/60 Hz)(MPa) 0.45/0.65 (at 30 L/min) 0.40/0.60 (at 4 L/min) 0.40/0.60 (at 40 L/min) 0.40/0.60 (at 40 L/min) Circulating