Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 8-21-37 for details.

Fieldbus system EtherCAT compatible SI Unit

(When L/A port1 LED is OFF.) LINK has not yet been established. L/A port1 or L/A port2 LEDs are OFF. (2) Check that the connectors of L/A port1 and L/A port2 communication cables are connected and there are no broken wires. (3) Keep noise sources away from the communication 9 cable.

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

Non-contact Gripper

C 16.5 L H L H 4 x M depth ML 4 x M depth ML L L 16.5 (mm) Part no.

Electromagnetic Digital Flow Switch

Model Flow range 0.5 L/min 2 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 0.5 L/min 20 L/min LFE1 0.4 L/min 24 L/min 0.4 L/min 24 L/min 2.5 L/min 100 L/min LFE2 2 L/min 120 L/min 2 L/min 120 L/min 5 L/min 200 L/min LFE3 4 L/min 240 L/min 4 L/min 240 L/min Rated flow range Display flow range Set flow range 21 These safety instructions are intended to prevent hazardous situations

MRHQ

3 m 5 m Nil L Z MRH 10 90 M9NV L Q D S M9N L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rotary gripper Number of auto switches 2 pcs. 1 pc.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

ZQ-OM01401

M () (2) B () ZQ 1VQ110 L -5 L -A (1) (1) L L 0.3m LO L 22 - No.ZQ-OM01401-B Assy N.C.N.O.Assy 1) SY100-30-4A-6 300mm 6 600mm (1) (1) 10 1000mm 15 1500mm Assy 20 2000mm A X T6 61 -13 A6 25 2500mm 30 3000mm (1) 50 5000mm N.C.N.O.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Clean Room Rodless Cylinder Series CYP ø15, ø32

(Nm) M1 M2 Model CYP15 CYP32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pich moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder central axis Dynamic Moment Moment

CEx-OML0058

T h e r e i s n o p a r t i c u l a r p r o b l e m i n u s i n g t h e s y s t e m . R e a d t h e i n s t r u c t i o n m a n u a l W i l l y o u d o a t h o r o u g h l y f o r t h i s i t e m a n d c o u n t e r p o s i t i o n i n g m o t i o n ?

SMC Electronic Switch Series Variations

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Union Tee: KPQT, KPGT D 3 x Applicable tubing Effective area mm2 D Model L Applicable tubing O.D. mm Note 1) Weight g M Q TPH TPS 4 L Q M D D KPGT04-00 KPQT04-00 10.4 7 4 4 17 4.5 19.7 6 KPGT06-00 KPQT06-00 12.8 9 10 10 18.5 5.3 21.8 8 KPGT08-00 KPQT08-00 15.2 16 18 26 20.5 6 25.3 4.2 8 10 KPGT10-00 KPQT10-00 18.5 25 29 41 23 6.8 28.4 M M L L 12 KPGT12-00 KPQT12-00 20.9 29 46 58 24 7.5 30.4

Ejector Valve Unit Series ZYY/ZYX 1

LOZ 10 X3 ZY 5 M Z S 15 M ZX Series Wiring specifications (Vacuum switch) X3 SX3000 ZR Lead wire length 0.6 m Nil L C CL CN Grommet type Lead wire length 3 m Rated voltage ZM Lead wire length 0.6 m DC specifications Connector type Lead wire length 3 m Connector type 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC ZH Output specifications (Vacuum switch) ZU Courtesy of Steven Engineering, Inc.-

Ejector Valve Unit Series ZYY/ZYX

S 15 ZM M ZMA Wiring specifications (Vacuum switch) Series ZQ X3 SX3000 Nil L C CL CN Lead wire length 0.6 m Grommet type ZH Lead wire length 3 m Rated voltage Lead wire length 0.6 m Connector type DC specifications ZU Lead wire length 3 m 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Connector type ZL Output specifications (Vacuum switch) ZY NPN open collector, single output Analog, no output

Digital Flow Switch (Manifold type)

Nil L/min oC Remote sensor G 1 L/min (gal/min) oC (oF) M L/min L oC G 1 gal/min gal oC Integrated display type F 1 gal/min gal oF J 1 L/min L oF Nil1 gal/min gal oC Integrated display type (IO-Link compatible) M L/min L oC : In accordance with the New Weights and Measures Act, use of the unit conversion function is not permitted in products for use in Japan.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire