Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Refer to the terminal block connection instructions.) 12 stations maximum Piping specifications Applicable stations A, B port location Port size Series P, R A, B 3/4 3/8,1/2 Side 12 stations max.

Rotary Actuator/Vane Type

, 12 V S99V S99 V V v v IC circuit 3-wire (PNP) S9PV S9P V V v v 2-wire 12 V T99V T99 V V v v Solid state auto switch Oilproof heavy-duty cord Yes For 10, 15 Relay, PLC 24 V Grommet 5 V, 12 V 5 V, 12 V, 24 V 90 Vinyl parallel cord V V V IC circuit 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V 90A Oilproof heavy-duty cord V V V Reed auto switch No 2-wire Yes 97 Vinyl parallel cord

CNG

x 1.0 26.5 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204) 28 M10 x 1.25 6 14 M14 x 1.5 44 1/8 2.5 81 169 (178) 12 4 12 50 35 17 70 241 (250) M6 x 1 depth 12 10 (12) 221 (230) Note) Dimensions inside ( ) are for long strokes. 5 Cylinder with Lock Double Acting: Single Rod Series CNG Basic type (B): With air cushion/CNGBA P Front

AC Servo Motor Driver (CC-Link Type ）

A 12 CONTENTS 1.

Cylinder with Lock Series CNG

2 85 10 (12) 18 5.5 6 4 8 5 201 to 350 to 200 201 to 350 20 to 300 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 301 to 400 to 300 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 301 to 450 to 300 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without

LEC-OM02904

12.5 . 5 12 1 12 12 (AE3) LE-S6-LE-S7-LE-S812.1 1 ON/OFF CYC CYC LS LS 1 1 LS0 CYC0 LEC-MR-J3BAT MR-J3BAT 1pul se/rev 1pulse/rev 1 1 12 2 12 12.2.

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

Air cylinder

, 16 Other qty. 70+40(n4)/2 n=4, 8, 12, 16 80+40(n4)/2 n=4, 8, 12, 16 85+40(n4)/2 n=4, 8, 12, 16 95+40(n4)/2 n=4, 8, 12, 16 1 switch, 2 switches (Different side, Same side) 45 55 60 70 50 D-A9V 50+30(n4)/2 n=4, 8, 12, 16 55+30(n4)/2 n=4, 8, 12, 16 60+30(n4)/2 n=4, 8, 12, 16 70+30(n4)/2 n=4, 8, 12, 16 Other qty. 45+30(n4)/2 n=4, 8, 12, 16 1 switch, 2 switches (Different side, Same side) 85

Compact Guide Cylinder

Load mass m [kg] Load mass m [kg] 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] 12 MGPK Series L L m m Plate Material Aluminum Alloy /MGPKM Vertical Mounting Operating pressure: 0.5 MPa or more Operating pressure: 0.4 MPa MGPKAM12 to 50 50 mm stroke or less, V = 200 mm/s or less Over 50 mm stroke, V

3 Port Air Operated Valve

40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-101 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 1/8, 1/4 3(R) port 18.5 11.2 30 2A NO 35 43 NC 12 3R 1P NC 1/8 12(PA) port 12 6.7 18.5 65.2

Stopper Cylinder

state auto switch RS2H 2-wire 12 V Connector RSH 3-wire (NPN) IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Yes Yes No No 24 V 3-wire (PNP) 2-wire MIW MIS 12 V Grommet 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 IC circuit 12 V 5 V, 12 V H7NF With diagnostic output (2-color indicator

Table of Contents

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 V Grommet (NPN equivalent) Yes Yes 100 V 12 V 24 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 12 V 2-wire Grommet 24 V IC circuit 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Solid state switches marked with are produced upon receipt of order.

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Models Metric sizes 10, 12 8 6 6 6 8 12 10 3.2, 4, 6 4 Tubing O.D.

VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for 4-M4 Manual release

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

, 20, 25, 32 32, 40, 50 40 to 100 40 to 100 40 to 100 12 to 100 20 to 80 32 to 63 25 to 40 32 to 63 32 to 63 20 to 40 20 to 40 20 to 40 20 to 40 40 to 63 40 to 63 16, 20 40, 50 12, 20 12, 20 10, 16 10, 16 Bore size 12 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F79F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL

LEC-OM071xx

CMD_DATA/RSP_DATA: Specified for individual commands. 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 Main Command Area CMD_DATA RSP_DATA 8-12 8 MECHATROLINK-III Commands Byte Command Response Description 32 SUBCMD RSUBCMD SUBCMD/RSUBCMD: 33 Command code specified for individual commands. Refer to 8.15 Subcommands.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99