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D B Reed auto switch D-A93 Solid state auto switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid

PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D 4 : For more information about the options, refer to our website (URL https://www.smcworld.com). Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

e) D (100) 50 - 15.4 1. 2. () 3. () 4. 5. 6. 7. 8. () (-10603585%) 51 - 15.5 5 15.6 OFF 52 - 16. 16.1 / 16.2 ON 53 - 5 () 54 - 16.3 50mm 16.4 () 55 - 16.5 16.6 D(100) 16.7 56 - Revision history No.JXC-OMT0034CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change

Note 5) 3/16", 3/8", 1/2"are made of brass AS131F (3.2, 4, 6, 1/8", 5/32, 1/4), AS231F-01(3.2, 4, 6, 1/8", 5/32) are POM. 15-9-5 5 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Applicable tubing O.D. d 1/8" Applicable tubing O.D. d A(2) Weight (g) T D1 H(1)

25 10 25 Ball screw specifications Shaft length [mm] Stroke + 284.5 Lead [mm] 50 25 10 Impact/Vibration resistance [m/s2] *5 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or lessNo condensation 4.58 Actuation unit weight [kg] specifications 0.43 0.05 Other inertia [kgcm] Other *6 Friction coeffcient 0.8 Mechaincal

(No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300/50 Impact/Vibration resistance (m/s2) Note 1) Note 1) Impact resistance: No malfunction to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2

Port size OUT port Symbol SUP/EXH port (Applicable tubing) Applicable tubing Write sequentially from the 1st station on the D side.

D-H7BALD-H7NF D-G59WD-G5PWD-K59W D-G59FD-G5NT D-C73CD-C80C D-B54D-B64D-B59W 3. 4. () () (M4 1~1.2Nm (M3 0.6~1Nm 11 <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V 5. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,

1 x 4 1.1 x 8 R 1/4 R 1/4 R 1/4 R 1/4 14 14 14 14 20 20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note) When a copper extension nozzle is ordered separately, a self-align fitting will also be required for

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

Symbol 10 20 50 Clamp stroke 10 mm 20 mm 50 mm Applicable bore size 12 to 40 12 to 63 50 to 63 Rotary direction (Unclamp Clamp) Clockwise Counterclockwise R L Applicable Auto Switches/Refer to page 29 through to 39 for further information on auto switches.

S Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R Lead wire length U 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions are intended to prevent

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

32 37 37 39 55 166 187 187 218 218 241 241 277 334 AM150 1 8 1 4 3 8 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AM250 AMl 1 2 3 8 1 2 , AM350 3 4 Related poroducts 1 2 3 4 , AM450 1 2 , 1 1 1, 1 AM550 AM650 3 4 AM450SAM, #4 AM550SAM, #5 AM650SAM, #6 AM150SAM, #1 AM250SAM, #2 AM350SAM, #3 4.6-4 Series AM Dimensions: AM850 Accessory D: With auto drain (N.O.) for AMD850 Options T: With element service