SMC Corporation of America
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[ ]: Value of the D-M9A ( ): Value of the D-A90/A93 D-M9V D-M9WV D-M9AV D-A9V A 20 (22) W B ( ): Value of the D-M9AV/A9V (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V A 16.5 15.0 22.0 30.0 D-M9A A 16.5 15.0 22.0 30.0 D-M9AV A 16.5 15.0 22.0 30.0 Bore size (mm) 6 10 16 20 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 W 5.5 0 0 2.5 W 7.5 2.0 2.0 0.5 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 A 16.5 15.0 22.0

Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. 3 position pressure center Operating pressure (MPa) SYA SYJA Flow Characteristics/Mass VZA Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Function Port size Pilot port size Mass (kg) b Cv b Cv Valve model VFA 2 position single 2 position single 2 position double 3 position

Dew point checker (Option : S) Air inlet port * Outlet port in case of Option R Body Purge air outlet port Case Front Fig 2.1 Names of parts -3- 2. Installations and Operations 2. Installations and Operations: Piping Air Supply Warning a.

Replacement while residual pressure is present in the product may cause injury or damage of the product. b. Precautions for membrane module removal When the filter and membrane air dryer is connected by spacer (modular connection), be sure to remove the membrane dryer before replacement. c.

L/min) PF2W504(T) A 0.5 4 PF2W520(T) B 2 16 PF2W540(T) C 5 40 PF2W511 D 10 100 Analogue output A B C Voltage output 1 V 1.5 V (1.4V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA The value in ( ) is when PF2W511 is used.

As a whole product, the fluid temperature range is specified as 0 to 90 oC. -69No.PF-OMN0012-H Characteristics graph Analogue output (Flow) (PF3W504/520/540) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W511) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W521) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 5.9 mA 20 mA Rated flow

(Part1:General requirements) ISO 10218-1992:Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:-((1 :) JIS B 8433-1993: 2) : : : 1 2. 3. 1. 2. 3. 4. 2 No.LFE*-OMY0008 / 1 1.5 3 3) 1 1 () [] 3 No.LFE*-OMY0008 () () () () 4 No.LFE*-OMY0008 () * (100 20 ) () <> 2MPa 5 No.LFE*-OMY0008 * (1623 ) FG (49N ) () M12 IN IN OUT OUT OUT OUT () 6 No.LFE

[mm] 40 170190 41(41.5) 41.5 80190 31.5(32) 32 ( ) : D-A72A7HA80H 25 7. 7. 7. 7. 7.1 7.2 (7.1)A A ON A B A OFFB ON (7.2)A A ON A B A OFFB ON 26 8. 8. 8. 8. 8-1

B act as multipliers for the Analog Input Value x is a System Analog Input (Choose A01, A02, A03, etc.)

(B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specications 2-position double 3-position pressure center (A) 4 (B) 2 Rubber (A) 4 (B) 2 VQ 4/5 Nil Side ported B Bottom ported 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQC 1/2 Manual override 3-position double check (A) 4 (B) 2 Note) 6 VQC 4/5 VQC 4/5 B: Locking type (Tool required) C: Locking type (Manual) Nil:

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

ON = A (A B)/4 A = Max. pressure OFF = B + (A B)/4 B = Min. pressure -23No.PS-OMH0006-F Setting of Special Function Fine adjustment function of displayed value This makes no dispersion on CH1 to CH4 each output value, and make same displayed value. It is possible to do fine adjustment within 5%R.D. range of the reading data on the displayed value of pressure sensor.

+ Stroke Dimensions (mm) A B GB Bore size 40 63 100 58 48.5 36.5 GB 73 61.5 38 78 66.5 38 Dimensions not listed above are the same as the standard model.

How to determine the auto switch installation position MHZ2 Step 2) Insert auto switch into the switch installation groove from direction B. "Set up as directed with power connected under no pressure or low pressure." A B MHZJ2 MHQ Step 3) Slide the auto switch in the direction of the arrow until the light illuminates.

(Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 17-5-132 2 Series LVN High Purity Fluoropolymer Needle Valve Standard Specifications Model LVN20 LVN30 LVN40 Tubing O.D.

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

B C D E Model no. E [Tightening torque] L[]ZC[]5[] 16 20 15.5 52.5 L[]ZC[]3[] 12 20 8 37 Model no. A B C D L[]ZC[]5[] M10 x 1.25 x 12 deep [24.5Nm] L[]ZC[]3[] M6 x 1.0 x 8 deep [5.2Nm] Model no.

[October 2017] B: Contents revised in several places. [July 2018] C: Contents revised in several places. [August 2019] D: Contents revised in several places.